Maruzen Petrochemical Company, Limited

Minoru Iijima

Toshifumi Takemori

Takanori Yamagishi

Shigeharu Yamamoto

Yoshihisa Hayashida

Masashi Iida

Sakae Kamiyama

Yukiko Hane

Masao Kawahara

A radical polymerization initiator represented by the following formula (G) in the formula (G), Rand Rare each a hydrocarbon group of 3 to 6 carbon atoms which may contain nitrogen atom; Rand Rare each a hydrogen atom or an acid-dissociating, dissolution-suppressing group; and at least one of Rand Ris an acid-dissociating, dissolution-suppressing group represented by the following formula (R); and wherein Ris a hydrocarbon group of 1 to 26 carbon atoms which may contain hetero atoms.

Copolymer for positive type lithography, polymerization initiator used in production of said copolymer, and composition for semiconductor lithography

A copolymer for positive type lithography, having at least a recurring unit (A) having a structure wherein an alkali-soluble group is protected by an acid-dissociating, dissolution-suppressing group, represented by the following formula (A) [in the formula (A), Ris a hydrogen atom or a hydrocarbon group which may be substituted by fluorine atom; Ris a crosslinked, alicyclic hydrocarbon group; n is an integer of 0 or 1; and Ris an acid-dissociating, dissolution-suppressing group], and a terminal structure (B) having a structure wherein an alkali-soluble group is protected by an acid-dissociating, dissolution-suppressing group, represented by the following formula (B) [in the formula (B), Ris a hydrocarbon group which may contain nitrogen atom; Ris an acid-dissociating, dissolution-suppressing group; and p is a site of bonding with copolymer main chain]. The copolymer is used in chemically amplified positive type lithography and is superior in lithography properties (e.g. dissolution contrast).

An olefin polymerization solid catalyst including a reaction product of a transition metal compound and an organoaluminum compound carried on a support having silica treated with an organoaluminum-oxy compound.

Olefin polymerization catalyst and olefin polymerization method using the same

A solid catalyst for olefin polymerization, which comprises a silica carrier (A) having a specific surface area of from 600 to 850 m /g, a pore volume of from 0.1 to 0.8 ml/g and an average particle size of from 2 to 12 &mgr;m, and an organoaluminum-oxy compound (B) and a Group IVB transition metal compound (C) containing a ligand having a cyclopentadienyl skeleton, supported on the carrier (A).

Catalyst for olefin polymerization and process for polymerizing olefin by means thereof

The present invention relates to a solid catalyst (D) for olefin polymerization comprising a magnesium-containing solid component (A) carrying thereon an organoaluminum-oxy compound (B) and a metallocene compound (C), the magnesium-containing compound (A) being obtained by heat treating a magnesium compound represented by the general formula: MgX .nH O where X represents a halogen atom and n is an integer of 1 to 12, and to a method of producing an olefinic polymer using the catalyst. In the case where the above solid catalyst for olefin polymerization is used, catalyst activity, particularly activity per solid catalyst, is high. Therefore, a deashing treatment step such as catalyst removal can be omitted. Further, the olefinic polymer produced has a narrow molecular weight distribution, and in the case of a copolymer, its monomer composition is uniform.

Solid catalyst for olefin polymerization and process for producing olefin polymer with the same

A solid catalyst for olefin polymerization, obtained by reacting a least one of a hydropolysiloxane compound, having the formula R H SiO , a silane compound of formula R Si(OH) , and condensates of the silane, with a compound of formula (MgR ) .(R MgX) to form a reaction product. The reaction product is reacted with an alcohol, having 1 to 4 carbon atoms, to obtain an intermediate product. The intermediate product, is then reacted with water to obtain reaction product. An organoaluminum oxy compound and a metallocene compound are carried on the solid reaction product. The solid catalyst may be used for olefin polymerization. The catalyst requires no deashing treatment and produces a polymer having high bulk density and narrow particle size distribution. Thus the solid catalystenables control of particle size of the polymer in a simple easy manner, and shows no adhesion of polymer onto the inner wall of autoclave.

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Chiba, Japan

Minoru Iijima