Samsung Electronics Co., Ltd.

Minkyung Bae

Bongyong Lee

Doohee Hwang

Myunghun Woo

Taehun Kim

Tae Hun Kim

Nayeong Yun

A vertical non-volatile memory device includes: a memory stack structure including gate lines and interlayer insulating layers and a channel hole extending in a stacking direction; a channel layer in the channel hole and extending in the stacking direction; and an information storage structure including a composite blocking insulating layer, a charge storage layer, and a tunneling insulating layer sequentially arranged in a horizontal direction from the gate lines to the channel layer, wherein the composite blocking insulating layer includes a metal oxide having a higher dielectric constant than silicon oxide, and the composite blocking insulating layer includes a first blocking insulating layer on sides of the gate lines and a second blocking insulating layer that is between the first blocking insulating layer and the charge storage layer and has a lower oxidation density than the first blocking insulating layer.

Vertical non-volatile memory devices

A vertical semiconductor layer includes a common source semiconductor layer on a substrate, a support layer on the common source semiconductor layer, gates and interlayer insulating layers alternately stacked on the support layer, a channel pattern extending in a first direction perpendicular to an upper surface of the substrate while penetrating the gates and the support layer, a sidewall of the support layer facing the channel pattern being offset relative to sidewalls of the gates facing the channel pattern, and an information storage layer extending between the gates and the channel pattern, the information storage layer extending at least to the sidewall of the support layer facing the channel pattern.

Method of fabricating a vertical semiconductor device

Vertical semiconductor device and method of fabricating the same

A semiconductor device includes a source layer; a plurality of channel structures; a plurality of gate electrodes; and a common source line. At least one of the plurality of gate electrodes provides a GIDL line. For an erasing operation, an erasing voltage applied to the common source line reaches a target voltage, and, after the erasing voltage reaches the target voltage, a step increment voltage is applied to the erasing voltage, such that the erasing voltage has a voltage level higher than a voltage level of the target voltage. After the step increment voltage has been applied for a desired time period, the voltage level of the erasing voltage is decreased to the target voltage level for the remainder of the erasing operation.

Semiconductor devices having increased efficiency in generation of gate-induced drain leakage current without insulation deterioration and methods of operating the same

A three-dimensional semiconductor memory device may include a stack including gate electrodes sequentially stacked on a substrate and a vertical structure penetrating the stack. The vertical structure may include a vertical channel portion, a charge storing structure on an outer side surface of the vertical channel portion, and a pad. The pad may include a first pad portion disposed in an internal space surrounded by the vertical channel portion and a second pad portion provided on the first pad portion and extended onto a top surface of the charge storing structure. A portion of the first pad portion may be disposed at the same level as an uppermost electrode of the gate electrodes.

Three-dimensional semiconductor memory devices

A three-dimensional (3D) semiconductor memory device may include a stack structure including gate electrodes sequentially stacked on a substrate, and a vertical channel penetrating the stack structure. The gate electrodes may include a ground selection gate electrode, a cell gate electrode, a string selection gate electrode, and an erase gate electrode, which are sequentially stacked on the substrate.

Three-dimensional semiconductor memory devices and method of manufacturing the same

An operating method of a nonvolatile memory device which includes a cell string including a plurality of cell transistors connected in series between a bit line and a common source line and stacked in a direction perpendicular to a substrate, the method including: programming an erase control transistor of the plurality of cell transistors; and after the erase control transistor is programmed, applying an erase voltage to the common source line or the bit line and applying an erase control voltage to an erase control line connected to the erase control transistor, wherein the erase control voltage is less than the erase voltage and greater than a ground voltage, and wherein the erase control transistor is between a ground selection transistor of the plurality of cell transistors and the common source line or between a string selection transistor of the plurality of cell transistors and the bit line.

Growing community of inventors

Hwaseong-si, South Korea

Minkyung Bae