Taiwan Semiconductor Manufacturing Comp. Ltd.

Tsinghua University

Mincent Lee

Hung-Chih Lin

Mill-Jer Wang

Hao Chen

Ching-Nen Peng

Cheng Wen Wu

Chen-Hung Tien

Chang Chia How

Among other things, one or more techniques or systems for evaluating a tiered semiconductor structure, such as a stacked CMOS structure, for misalignment are provided. In an embodiment, a connectivity test is performed on vias between a first layer and a second layer to determine a via diameter and a via offset that are used to evaluate misalignment. In an embodiment, a connectivity test for vias within a first layer is performed to determine an alignment rotation based upon which vias are connected through a conductive arc within a second layer or which vias are connected to a conductive pattern out of a set of conductive patterns. In this way, the via diameter, the via offset, or the alignment rotation are used to evaluate the tiered semiconductor structure, such as during a stacked CMOS process, for misalignment.

Alignment testing for tiered semiconductor structure

A method of probe testing dies, the method includes loading a wafer having a first die and a second die into a prober and bringing probes of the prober into contact with first contact pads of the first die according to first probe parameters. A first probe contact test of first values of the contact between the probes and the first contact pads is performed, and a die test of the first die is performed after performing the probe contact test. Results of the die test and results of the probe contact test are saved and second probe parameters are automatically generated based on at least the results of the first probe contact test.

Integrated fan-out pillar probe system

A method for repairing a main memory comprises the steps of: utilizing a spare memory to repair a main memory, wherein the spare memory includes a plurality of spare memory units; allocating a spare memory unit; determining whether available permutations of the allocated spare memory unit cover a newly found defect in the main memory; removing permutations of the spare memory unit failing to cover newly found defects in the main memory; and allocating another spare memory unit to repair the newly found defects if available permutations of the allocated spare memory unit fails to cover the newly found defects.

Method for repairing memory and system thereof

Growing community of inventors

Taipei, Taiwan

Mincent Lee