Korea Institute of Machinery & Materials

Min-Suk Cha

Dae-hoon Lee

Kwan-Tae Kim

Young-Hoon Song

Jae-Ok Lee

Min Goo Hur

The present invention provides a plasma reactor for abating hazardous materials generated in a low-pressure process during a process of manufacturing a display or a semiconductor. A plasma reactor for abating hazardous materials according to an exemplary embodiment of the present invention includes: a first ground electrode and a second ground electrode disposed at a distance from each other; a dielectric fixed between the first ground electrode and the second ground electrode; and at least one driving electrode disposed on an outer surface of the dielectric, being spaced apart from the first ground electrode and the second ground electrode and connected to an AC power supply unit to receive a driving voltage therefrom.

Plasma reactor for abating hazardous materials and driving method thereof

A plasma scrubber that forms a high temperature atmosphere in a reactor to effectively decompose and remove a non-biodegradable gas and reduce power consumption is disclosed. The plasma scrubber includes: a first reactor to which a non-biodegradable gas is supplied; an electrode installed in the first reactor and protruding in the flow direction of the non-biodegradable gas to generate plasma in the non-biodegradable gas supplied between the electrode and the first reactor by a discharge reaction in the first reactor; a second reactor connected to the first reactor to form continuous arc jets by anchoring the plasma to the electrode; and a third reactor connected to the second reactor to decompose the non-biodegradable gas by forming a reaction section of high temperature that contains electrons and chemical species of high reactivity in the second reactor and thereby increasing the stay time and reactivity of the non-biodegradable gas.

Plasma scrubber

A plasma burner and a diesel particulate filter (DPF) trap that can effectively oxidize and remove a particulate material (PM) within an exhaust gas by preheating fuel and mixing the fuel with the exhaust gas are provided. The DPF includes: a filter that is connected to an exhaust conduit at a side opposite to that of an engine; a plasma burner that is provided within the exhaust conduit between the engine and the filter, and that includes a fuel inlet that supplies fuel and a flame vent that projects a flame by a plasma discharge, and that heats exhaust gas; and a fuel inflow conduit that connects the fuel inlet and a fuel tank.

Growing community of inventors

Daejeon, South Korea

Min-Suk Cha