General Electric Company

Semiconductor Manufacturing International (shanghai) Corporation

Semiconductor Manufacturing International (beijing) Corporation

Min Da Hu

Hai Yang

Cheng Zhang

Yunfeng Liu

Wei Cai

Hai Yang Zhang

Rihua Xiong

John H Barber

Xin Gao

Ran Niu

Er Hu Zheng

Yufeng Liu

An etching method and a fabrication method of semiconductor structures are provided. The etching method includes forming trenches in a to-be-etched structure, and forming a dielectric layer in the trenches. The etching method further includes etching the dielectric layer in the trenches by an etching process, and controlling at least an etching temperature of the etching process while a polymer is formed on side surface of the to-be-etched structure. During the etching process of the dielectric layer, the polymer undergoes a deposition stage and a removal stage. The deposition stage has a deposition rate of the polymer greater than an etch rate of the polymer, and the removal stage has the deposition rate of the polymer less than the etch rate of the polymer.

Etching method and fabrication method of semiconductor structures

A system comprising a plurality of stacks and a plurality of converters, each of the plurality of converters is operable to charge a corresponding stack for adsorbing ions in a liquid, wherein when one of the plurality of stacks is charged or discharged at a first state, one of the plurality of converters associating with the stack operates in a first mode, and is configured to indirectly convert a first voltage to a second voltage at least by an intermediate stage, one of the plurality of stacks is charged or discharged at a second state, one of the plurality of converters associating with the stack operates in a second mode, and is configured to directly convert the first voltage to the second voltage.

System and method for power charging or discharging

An electrochemical desalination system includes a first and a second electrochemical device and a controller. The first and second electrochemical devices each comprises a electrochemical desalination module comprising at least one pair of electrodes and a compartment between each pair of electrodes for receiving an electrolyte solution. Each of the first and second electrochemical desalination devices comprises a plurality of successive operation cycles. Each cycle comprises a charging mode of operation for charging each pair of electrodes and for adsorbing ions in the electrolyte solution on the electrodes, and a discharging mode of operation for discharging the pair of electrodes and for desorbing ions from the pair of electrodes. The controller is configured to control the system that the first and second electrochemical desalination devices have interleaved charging and discharging modes of operation. One of the first and second electrochemical desalination devices is in a discharging mode and the at least one pair of electrodes release electrical current, while the other of the first and second electrochemical desalination devices is in a charging mode of operation and receives the electrical current released from said one of the first and second electrochemical desalination device.

Electrochemical desalination system and method

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Min Da Hu