Samsung Electronics Co., Ltd.

Min-Choul Kim

Ju-Youn Kim

Sang-Hyun Woo

Baik-Min Sung

Sang-min Lee

Min-Yeop Park

Bo-Soon Kim

A semiconductor device includes a fin protruding from a substrate and extending in a first direction, first and second gate structures intersecting the fin, a recess formed in the fin between the first and second gate structures, a device isolation layer which fills the recess, and which has an upper surface protruded outwardly from the fin and disposed to be coplanar with upper surfaces of the first and second gate structures, a liner formed along a side walls of the device isolation layer protruded outwardly from the fin and a source/drain region disposed at both sides of the recess and spaced apart from the device isolation layer.

Semiconductor device having a device isolation layer

Semiconductor device

Methods are provided for manufacturing semiconductor devices include forming a first fin protruding on a substrate and extending in a first direction; forming first and second sacrificial gate insulating layers on the first fin, the first and second sacrificial gate insulating layers intersecting the first fin and being spaced apart from each other; forming first and second sacrificial gate electrodes respectively on the first and second sacrificial gate insulating layers; forming a first insulating layer on the first and second sacrificial gate electrodes; removing a portion of the first insulating layer to expose the second sacrificial gate electrode; removing the exposed second sacrificial gate electrode using a first etching process to expose the second sacrificial gate insulating layer; removing the exposed second sacrificial gate insulating layer using a second etching process different from the first etching process to form a first trench which exposes the first fin; forming a first recess in the exposed first fin using a third etching process different from the second etching process; and filling the first recess with a first device isolation layer.

Methods of manufacturing semiconductor devices including device isolation processes

Growing community of inventors

Hwaseong-si, South Korea

Min-Choul Kim