National Institute for Materials Science

Mikk Lippmaa

Hideomi Koinuma

Tsuyoshi Ohnishi

Masatomo Sumiya

Eiji Fujimoto

Disclosed is a device for vacuum processing that performs vapor-deposition on a substrate being heated in a vacuum chamber; the device, wherein the chamber has a light transmissible window formed in a section of the chamber; the light transmissible window and a holding part holding the substrate are connected by a linear space isolated from other parts in the chamber; a laser emitter is installed outside the light transmissible window; and the laser emitter emits a laser beam to the substrate through the linear space, thereby heating the substrate. This device enables laser heating, eliminating conventional drawbacks such as a decrease in laser output.

Growing community of inventors

Tokyo, Japan

Mikk Lippmaa