Average Co-Inventor Count = 1.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Societe Pour L'etude Et La Fabrication De Circuits Integres Speciaux (1 from 15 patents)
1 patent:
1. 4356055 - Process and device for monitoring the plasma etching of thin layer