International Business Machines Corporation

Globalfoundries U.S. Inc.

Globalfoundries Inc.

Elpis Technologies Inc.

Michel J Abou-Khalil

Robert J Gauthier, Jr

Souvick Mitra

JunJun Li

Christopher Stephen Putnam

Tom C Lee

Steven M Shank

Anthony K Stamper

Alvin Jose Joseph

John J Ellis-Monaghan

Robert Russell Robison

Siva P Adusumilli

James Albert Slinkman

Alan Bernard Botula

Junjun Li

Kiran V Chatty

Theodore James Letavic

Rajendran Krishnasamy

Aaron Vallett

Mark David Jaffe

Michael Joseph Zierak

Hongmei Li

Robert Gauthier

Bojidha Babu

William R Tonti

Zhong-Xiang He

Alain F Loiseau

William F Clark, Jr

Stephen Ellinwood Luce

Yun Shi

Mark Levy

Mujahid Muhammad

Richard A Phelps

James Paul Di Sarro

Johnatan A Kantarovsky

Ephrem G Gebreselasie

Ramsey M Hazbun

Shunhua Thomas Chang

Venkata N R Vanukuru

Anupam Dutta

Nathaniel Peachey

Ian McCallum-Cook

Sarah A McTaggart

Randy Wolf

Blaine Jeffrey Gross

Satyasuresh V Choppalli

Ahmed Y Ginawi

Chee Kwang Quek

Richard J Rassel

Henry Aldridge

Mitra Souvick

Yang Yang

Christopher S Putnam

A semiconductor device is provided. The semiconductor device includes a substrate, a semiconductor layer, a device layer, and heat dissipating structures. The semiconductor layer is over the substrate and the device layer is over the semiconductor layer. The device layer includes a first ohmic contact and a second ohmic contact. The heat dissipating structures are at least through the substrate and the semiconductor layer, and between the first ohmic contact and the second ohmic contact.

High-mobility-electron transistors having heat dissipating structures

Semiconductor structures including electrical isolation and methods of forming a semiconductor structure including electrical isolation. The structure includes a semiconductor substrate having a first surface, a recess in the first surface, and a second surface inside the first recess. The structure further includes a shallow trench isolation region extending from the first surface into the semiconductor substrate. The shallow trench isolation region is positioned to surround an active device region including the recess. A field-effect transistor includes a gate electrode positioned on a portion of the second surface.

Field-effect transistors having a gate electrode positioned inside a substrate recess

The present disclosure relates to semiconductor structures and, more particularly, to an eFuse and gate structure on a triple-well and methods of manufacture. The structure includes: a substrate comprising a bounded region; a gate structure formed within the bounded region; and an eFuse formed within the bounded region and electrically connected to the gate structure.

Efuse inside and gate structure on triple-well region

Device structures for a field-effect transistor and methods of forming a device structure for a field-effect transistor. A trench isolation region is formed in a substrate, and surrounds a semiconductor body. An undercut cavity region is also formed in the substrate. The undercut cavity region extends laterally beneath the semiconductor body and defines a body pedestal as a section of the substrate that is arranged in vertical alignment with the semiconductor body.

Field-effect transistors with a body pedestal

The present disclosure relates to semiconductor structures and, more particularly, to vertically stacked field effect transistors and methods of manufacture. The structure includes: at least one lower gate structure on a bottom of a trench formed in substrate material; insulator material partially filling trench and over the at least one lower gate structure; an epitaxial material on the insulator material and isolated from sidewalls of the trench; and at least one upper gate structure stacked vertically above the at least one lower gate structure and located on the epitaxial material.

Vertically stacked field effect transistors

Semiconductor device structures with substrate biasing, methods of forming a semiconductor device structure with substrate biasing, and methods of operating a semiconductor device structure with substrate biasing. A substrate contact is coupled to a portion of a bulk semiconductor substrate in a device region. The substrate contact is configured to be biased with a negative bias voltage. A field-effect transistor includes a semiconductor body in the device region of the bulk semiconductor substrate. The semiconductor body is electrically isolated from the portion of the bulk semiconductor substrate.

Semiconductor device structures with a substrate biasing scheme

Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. A shallow trench isolation region is formed in a semiconductor substrate. A trench is formed in the shallow trench isolation region, and a body region is formed in the trench of the shallow trench isolation region. The body region is comprised of a polycrystalline semiconductor material.

Field-effect transistors with a polycrystalline body in a shallow trench isolation region

Embodiments of the disclosure provide an integrated circuit (IC) structure with a high impedance semiconductor material between a substrate and transistor. The IC structure may include: a substrate, a high impedance semiconductor material on a portion of the substrate, and a transistor on a top surface of the high impedance semiconductor material. The transistor includes a semiconductor channel region horizontally between a first source/drain (S/D) region and a second S/D region. The high impedance semiconductor material is vertically between the transistor and the substrate; a first insulator region is on the substrate and horizontally adjacent the first S/D region; and a first doped well is on the substrate and horizontally adjacent the first insulator region. The first insulator region is horizontally between the first doped well and the transistor.

Integrated circuit (IC) structure with high impedance semiconductor material between substrate and transistor

Structures including electrical isolation and methods of forming a structure including electrical isolation. A first polycrystalline layer is located in a substrate, and a second polycrystalline layer is positioned between the first polycrystalline layer and a top surface of the substrate. The substrate includes a first portion of the single-crystal semiconductor material that is positioned between the second polycrystalline layer and the top surface of the substrate. The substrate includes a second portion of the single-crystal semiconductor material that is positioned between the first polycrystalline layer and the second polycrystalline layer. The first polycrystalline layer has a thickness. The second polycrystalline layer has a portion with a thickness that is greater than the thickness of the first polycrystalline layer.

Buried damage layers for electrical isolation

Structures including electrical isolation and methods associated with forming such structures. A semiconductor layer has a top surface, a polycrystalline region, and a single-crystal region between the polycrystalline region and the top surface. An isolation band is located beneath the single-crystal region. The isolation band contains a first concentration of an n-type dopant and a second concentration of a p-type dopant, and a net difference between the first concentration and the second concentration is within a range of about five percent to about fifteen percent.

Semiconductor structures including stacked depleted and high resistivity regions

Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. A gate structure is formed over a channel region of a substrate. A first source/drain region is positioned in the substrate adjacent to a first sidewall of the gate structure, a second source/drain region is positioned in the substrate adjacent to a second sidewall of the gate structure, and an extension region is positioned in the substrate. The extension region includes first and second sections that each overlap with the first source/drain region. The first and second sections of the extension region are spaced apart along a longitudinal axis of the gate structure. A portion of the channel region is positioned along the longitudinal axis of the gate structure between the first and second sections of the extension region.

Transistors with sectioned extension regions

Semiconductor structures including electrical isolation and methods of forming a semiconductor structure including electrical isolation. Shallow trench isolation regions extend from a top surface of a semiconductor substrate into the semiconductor substrate. The semiconductor substrate contains single-crystal semiconductor material, and the shallow trench isolation regions are positioned to surround an active device region of the semiconductor substrate. A polycrystalline layer is formed in the semiconductor substrate. The polycrystalline layer has a first section beneath the active device region and a second section beneath the plurality of shallow trench isolation regions. The first section of the polycrystalline layer is located at a different depth relative to the top surface of the semiconductor substrate than the second section of the polycrystalline layer.

Multi-depth regions of high resistivity in a semiconductor substrate

Structures for a field-effect transistor and methods of forming a field-effect transistor. A first gate electrode has a first plurality of segments arranged in series to define a first non-rectilinear chain. A second gate electrode is arranged adjacent to the first gate electrode. The second gate electrode includes a second plurality of segments arranged in series to define a second non-rectilinear chain. A source/drain region is laterally arranged between the first gate electrode and the second gate electrode.

Field-effect transistors with laterally-serpentine gates

Structures and methods are provided for nanosecond electrical pulse anneal processes. The method of forming an electrostatic discharge (ESD) N+/P+ structure includes forming an cathode on a substrate and a anode on the substrate. The anode is in electrical contact with the cathode. The method further includes forming a device between the cathode and the anode. A method of annealing a structure or material includes applying an electrical pulse across an electrostatic discharge (ESD) N+/P+ structure for a plurality of nanoseconds.

Structures, methods and applications for electrical pulse anneal processes

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Essex Junction, VT, United States of America

Michel J Abou-Khalil