Saint-gobain Performance Plastics Corporation

Saint-gobain Corporation

Michael John Mangaudis

David Wilkinson

Colleen E Hamilton

Bryan David Hirschorn

Thomas Szymanski

Anne B Hardy

John Stewart Reid

James Salvatore

The disclosure is directed to a chemical mechanical polishing retaining ring including a polymer matrix and a filler including polyimide. The chemical mechanical polishing retaining ring has a wear rate performance not greater than about 75 microns/hour.

Chemical mechanical polishing retaining ring, apparatuses and methods incorporating same

In one embodiment, the disclosure is directed to a chemical mechanical polishing retaining ring. The chemical mechanical polishing retaining ring includes a support formed of a first material comprising a first polymer and a wear portion formed of a second material comprising a second polymer. The first material has an elastic modulus greater than the elastic modulus of the second material.

Chemical mechanical polishing retaining ring with integral polymer backing

Ceramic media made using ceramic components comprising from 5 to 60% by weight of spodumene and 95 to 40 wt % of other ceramic-forming components comprising clay and feldspar have a reduced tendency to shrink upon firing to form the media and improved physical properties.

Ceramic media

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Worcester, MA, United States of America

Michael John Mangaudis