Average Co-Inventor Count = 2.97
ph-index = 21
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kla Tencor Corporation (40 from 1,787 patents)
2. Applied Materials, Inc. (32 from 13,472 patents)
3. Kla-tencor Technologies Corporation (29 from 640 patents)
4. Kla—tencor Technologies Corporation (1 from 1 patent)
102 patents:
1. 12394655 - Subsurface alignment metrology system for packaging applications
2. 12288350 - Image based metrology of surface deformations
3. 12276490 - System and method to map thickness variations of substrates in manufacturing systems
4. 12222659 - Metrology system for packaging applications
5. 12211717 - Spatial pattern loading measurement with imaging metrology
6. 12098914 - Surface roughness and emissivity determination
7. 12002665 - Real-time detection of particulate matter during deposition chamber manufacturing
8. 11908716 - Image-based in-situ process monitoring
9. 11442000 - In-situ, real-time detection of particulate defects in a fluid
10. 11441992 - Method and apparatus for detection of particle size in a fluid
11. 11417010 - Image based metrology of surface deformations
12. 11353389 - Method and apparatus for detection of particle size in a fluid
13. 11309163 - Multibeamlet charged particle device and method
14. 11204330 - Systems and methods for inspection of a specimen
15. 11187654 - Imaging reflectometer