USA as Represented by Secretary of the Navy

Tokyo Electron Limited

Medona B Denton

David L Windsor

Wayne L Johnson

Murray D Sirkis

David R Heine

Scott B Tilden

A method and system for using transmission spectroscopy to measure a temperature of a substrate (). By passing light through a substrate, the temperature of the substrate can be determined using the band-edge characteristics of the wafer. This in-situ method and system can be used as a feedback control in combination with a variable temperature substrate holder () to more accurately control the processing conditions of the substrate. By utilizing a multiplicity of measurement sites the variation of the temperature across the substrate () can also be measured.

Method of wafer band-edge measurement using transmission spectroscopy and a process for controlling the temperature uniformity of a wafer

A radial or azmuthal non-resonant flow-through optoacoustic cell is operated without windows, completely eliminating the window background interference. The cell is constructed of an elongated tube the length of which is 34.times.10.sup.3 cm.times.1/f, where f is the light source modulating frequency and is made of conducting material which is perforated along the center one-half length with holes. A metalized sheath surrounds this center region to form a capacitor microphone.

Radial and azmuthal non-resonant open-tubular optoacoustic cell

Apparatus for nebulizing particulate laden undiluted oil samples of varying iscosities suitable for subsequent analysis utilizing atomic spectroscopic principles. Undiluted samples of varying viscosity are heated as they are fed through an inlet tube where the heated oil is fed into a channel groove and brought into contact with a nebulizing gas introduced through an orifice intersecting the channeled groove in which the oil flows.

Apparatus for nebulizing particulate laden samples of lubricating oils

An inductively coupled plasma torch (ICP) provides an efficient means for ermally degrading many organic molecules and exciting the resulting atomic species into optical emission. Spectrometric analysis produces reliable data for qualitative and quantiative simultaneous, multi-element analyses. To determine the empirical formula of a molecular compound, a gas chronometer is used to separate a mixture and atomic emission monitored continuously by a multi-channel spectrometer over the period of time required for the rise and fall of the elution. The plural channels provide parallel outputs defining intensity relationships or ratios of the excited elements. Instantaneous sampling repetitively made during the elution period provides a large number of discrete ratios that are averaged to provide the desired empirical formula. Molecular formulas then are derivable.

Application of inductively coupled plasma emission spectrometry to the

Precise concentric alignment of the coolant, plasma and sample gas tubes d in conventional ICPs is an operationally important factor often achieved by fused arrangements which effectively preclude dismountability for maintenance and repair. Spacer rings slip-fitted into the coolant and plasma passages provide support for the concentric arrangement and also permit dismountability. Each ring is slotted to direct coolant and plasma gases and improve their intended functions. One ring spans the plasma tube and has a number of vertically-directed peripheral slots producing a laminar plasma gas flow. The other ring spans the coolant passage and has a pair of threads cut at spaced intervals to spiral the coolant gas and improve its heat transfer function. A separable base member supports the concentric lower ends of the tubes.

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Tuscon, AZ, United States of America

Medona B Denton