Average Co-Inventor Count = 7.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Novellus Systems Incorporated (1 from 993 patents)
1 patent:
1. 6342133 - PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter