Intel Corporation

Mauro J Kobrinsky

Tahir Ghani

Abhishek A Sharma

Wilfred Gomes

Patrick R Morrow

Christopher J Jezewski

Carl H Naylor

Mark T Bohr

Kevin Lai Lin

Sarah E Kim

Anand S Murthy

Johanna M Swan

Rishabh Mehandru

Doug B Ingerly

Biswajeet Guha

Rajesh Kumar

Urusa Alaan

Marni Nabors

Shawna M Liff

Paul B Fischer

Peter Chang

Shriram Ramanathan

Kinyip Phoa

Brennen Karl Mueller

Daniel Pantuso

Aleksandar Aleksov

Glenn A Glass

Kevin O'Brien

Leonard P Guler

Bruce A Block

Ashish Agrawal

R Scott List

Chytra Pawashe

Adel A Elsherbini

Charles Henry Wallace

Harold W Kennel

Robert L Bristol

Swaminathan Sivakumar

Chandra S Mohapatra

Richard E Schenker

Karthik Jambunathan

Ramanan Chebiam

Elliot Tan

Kevin Fischer

Rajendra C Dias

Jeffery D Bielefeld

Stephanie A Bojarski

Jasmeet S Chawla

Thomas N Marieb

Gilbert W Dewey

Uygar E Avci

Henning Braunisch

Aaron D Lilak

Bernhard Sell

Kimin Jun

Yih Wang

Gerald S Pasdast

Scott Bruce Clendenning

Ehren Mannebach

Ibrahim Ban

Miriam Ruth Reshotko

Mohit K Haran

Justin R Weber

Ranjith Kumar

Il-Seok Son

Matthew V Metz

Van H Le

Ram K Krishnamurthy

Srinivas V Pietambaram

James S Clarke

Elijah V Karpov

Manish Chandhok

Oleg Golonzka

Jeanette M Roberts

Hui Jae Yoo

Florian Gstrein

Sanka Ganesan

Pooya Tadayon

Rami Hourani

Szuya S Liao

Himanshu Kaul

Cory C Bomberger

Dilan Seneviratne

Javier Soto Gonzalez

Nazila Haratipour

Sean W King

Jun He

Andy Chih-Hung Wei

Nafees Kabir

John J Plombon

Gopinath Bhimarasetti

Shem Ogadhoh

Ryan Keech

Ying Zhou

Allen B Gardiner

Guillaume Bouche

Zheng Guo

Sudarat Lee

Jessica M Torres

Richard F Vreeland

Described herein are integrated circuit (IC) structures, devices, and methods associated with device layer interconnects. For example, an IC die may include a device layer including a transistor array along a semiconductor fin, and a device layer interconnect in the transistor array, wherein the device layer interconnect is in electrical contact with multiple different source/drain regions of the transistor array.

Device layer interconnects

Integrated circuit structures having source or drain structures with low resistivity are described. In an example, integrated circuit structure includes a fin having a lower fin portion and an upper fin portion. A gate stack is over the upper fin portion of the fin, the gate stack having a first side opposite a second side. A first source or drain structure includes an epitaxial structure embedded in the fin at the first side of the gate stack. A second source or drain structure includes an epitaxial structure embedded in the fin at the second side of the gate stack. Each epitaxial structure of the first and second source or drain structures include silicon, germanium, gallium and boron. The first and second source or drain structures have a resistivity less than 2E-9 Ohm cm.

SiGe:GAB source or drain structures with low resistivity

Integrated circuitry comprising interconnect metallization on both front and back sides of a gate-all-around (GAA) transistor structure lacking at least one active bottom channel region. Bottom channel regions may be depopulated from a GAA transistor structure following removal of a back side substrate that exposes an inactive portion of a semiconductor fin. During back-side processing, one or more bottom channel region may be removed or rendered inactive through dopant implantation. Back-side processing may then proceed with the interconnection of one or more terminal of the GAA transistor structures through one or more levels of back-side interconnect metallization.

Double-sided integrated circuit transistor structures with depopulated bottom channel regions

Back-side transistor contacts that wrap around a portion of source and/or drain semiconductor bodies, related transistor structures, integrated circuits, systems, and methods of fabrication are disclosed. Such back-side transistor contacts are coupled to a top and a side of the source and/or drain semiconductor and extend to back-side interconnects. Coupling to top and side surfaces of the source and/or drain semiconductor reduces contact resistance and extending the metallization along the side reduces transistor cell size for improve device density.

Epitaxial source/drain back-side device contact structures with wrap around metallization and protective conformal liner

An integrated circuit interconnect level including a lower metallization line vertically spaced from upper metallization lines. Lower metallization lines may be self-aligned to upper metallization lines enabling increased metallization line width without sacrificing line density for a given interconnect level. Combinations of upper and lower metallization lines within an interconnect metallization level may be designed to control intra-layer resistance/capacitance of integrated circuit interconnect. Dielectric material between two adjacent co-planar metallization lines may be recessed or deposited selectively to the metallization lines. Supplemental metallization may then be deposited and planarized. A top surface of the supplemental metallization may either be recessed to form lower metallization lines between upper metallization lines, or planarized with dielectric material to form upper metallization lines between lower metallization lines. Vias to upper and lower metallization line may extend another metallization level.

Vertically spaced intra-level interconnect line metallization for integrated circuit devices

Integrated circuit structures having backside self-aligned penetrating conductive source or drain contacts, and methods of fabricating integrated circuit structures having backside self-aligned penetrating conductive source or drain contacts, are described. For example, an integrated circuit structure includes a sub-fin structure over a vertical stack of horizontal nanowires. An epitaxial source or drain structure is laterally adjacent and coupled to the vertical stack of horizontal nanowires. A conductive source or drain contact is laterally adjacent to the sub-fin structure and extends into the epitaxial source or drain structure. The conductive source or drain contact does not extend around the epitaxial source or drain structure.

Integrated circuit structures with backside self-aligned penetrating conductive source or drain contact

Gate-all-around integrated circuit structures having backside contact with enhanced area relative to an epitaxial source or drain region are described. For example, an integrated circuit structure includes a first vertical arrangement of nanowires and a second vertical arrangement of nanowires. A gate stack is over the first and second vertical arrangements of nanowires. First epitaxial source or drain structures are at ends of the first vertical arrangement of nanowires. Second epitaxial source or drain structures are at ends of the second vertical arrangement of nanowires. A conductive structure is vertically beneath and in contact with one of the first epitaxial source or drain structures. The conductive structure is along an entirety of a bottom of the one of the first epitaxial source or drain structures, and the conductive structure can also be along a portion of sides of one of the first epitaxial source or drain structures.

Gate-all-around integrated circuit structures having backside contact with enhanced area relative to epitaxial source

Described herein are transistors with front-side and back-side routing, and IC devices including such transistors. The transistor includes a channel material having a longitudinal structure and formed in a dielectric material. A source region encloses a first portion of the channel material, a gate electrode encloses a second portion of the channel material, and a drain region encloses a third portion of the channel material. Each of the source region, gate electrode, and drain region have a first face and a second face opposite the first face, the first and second faces co-planar with the faces of the dielectric material. A first contact is coupled to the first face of the source region, and a second contact is coupled to the second face of the source region.

Transistor with front-side and back-side contacts and routing

Embodiments described herein may be related to apparatuses, processes, systems, and techniques directed to electrical couplings between epitaxial structures and voltage sources within transistors in SRAM bit cells. Embodiments include direct electrical couplings between a backside contact metal (BM0) and a backside of an epitaxial structure to provide SRAM VCC voltage (SVCC) voltage, as well as electrical connection structures that electrically couple the BM0 to a front side of an epitaxial structure to provide SVCC voltage. Other embodiments may be described and/or claimed.

Backside electrical contact for PMOS epitaxial voltage supply

Embodiments disclosed herein include semiconductor devices with improved contact resistances. In an embodiment, a semiconductor device comprises a semiconductor channel, a gate stack over the semiconductor channel, a source region on a first end of the semiconductor channel, a drain region on a second end of the semiconductor channel, and contacts over the source region and the drain region. In an embodiment, the contacts comprise a silicon germanium layer, an interface layer over the silicon germanium layer, and a titanium layer over the interface layer.

Low germanium, high boron silicon rich capping layer for PMOS contact resistance thermal stability

Integrated circuit structures having backside gate tie-down are described. In an example, a structure includes a first vertical stack of horizontal nanowires over a first sub-fin, and a second vertical stack of horizontal nanowires over a second sub-fin, the second vertical stack of horizontal nanowires spaced apart from and parallel with the first vertical stack of horizontal nanowires. A gate structure includes a first gate structure portion over the first vertical stack of horizontal nanowires, wherein the first gate structure extends along an entirety of the first sub-fin. A second gate structure portion is over the second vertical stack of horizontal nanowires, wherein the second gate structure does not extend along an entirety of the second sub-fin. A gate cut is between the first gate structure portion and the second gate structure portion.

Integrated circuit structures having backside gate tie-down

Microelectronic assemblies fabricated using hybrid manufacturing with modified via-last process are disclosed. The fabrication approach is based on using hybrid manufacturing to bond first and second IC structures originally provided on different dies but filling at least portions of vias that are supposed to couple across a bonding interface between the first and second IC structures with electrically conductive materials after the IC structures have been bonded. A resulting microelectronic assembly that includes the first and second IC structures bonded together may have vias extending through all of the first IC structure and into the second IC structure, thus providing electrical coupling between one or more components of the first IC structure and those of the second IC structure, where an electrically conductive material in the individual vias is continuous through the first IC structure and at least a portion of the second IC structure.

Hybrid manufacturing with modified via-last process

Integrated circuitry interconnect structures comprising a first metal and a graphene cap over a top surface of the first metal. Within the interconnect structure an amount of a second metal, nitrogen, or silicon is greater proximal to an interface of the graphene cap. The presence of the second metal, nitrogen, or silicon may improve adhesion of the graphene to the first metal and/or otherwise improve electromigration resistance of a graphene capped interconnect structure. The second metal, nitrogen, or silicon may be introduced into the first metal during deposition of the first metal, or during a post-deposition treatment of the first metal. The second metal, nitrogen, or silicon may be introduced prior to, or after, capping the first metal with graphene.

Integrated circuit interconnect structures with graphene cap

Embodiments disclosed herein include transistor devices and methods of making such devices. In an embodiment, the transistor device comprises a stack of semiconductor channels with a first source/drain region on a first end of the semiconductor channels and a second source/drain region on a second end of the semiconductor channels. In an embodiment, the first source/drain region and the second source/drain region have a top surface and a bottom surface. In an embodiment, the transistor device further comprises a first source/drain contact electrically coupled to the top surface of the first source/drain region, and a second source/drain contact electrically coupled to the bottom surface of the second source/drain region. In an embodiment, the second source/drain contact is separated from the second source/drain region by an interfacial layer.

Contact resistance reduction in transistor devices with metallization on both sides

Embodiments disclosed herein include interconnect layers that include non-uniform interconnect heights and methods of forming such devices. In an embodiment, an interconnect layer comprises an interlayer dielectric (ILD), a first interconnect disposed in the ILD, wherein the first interconnect has a first height, and a second interconnect disposed in the ILD, wherein the second interconnect has a second height that is different than the first height.

Multi-height interconnect trenches for resistance and capacitance optimization

Growing community of inventors

Portland, OR, United States of America

Mauro J Kobrinsky