Suss Microtec Lithography Gmbh

Matthias Conradi

Sven Hansen

Georg Fink

Janusz Schulz

A spacer displacement device for a wafer illumination unit comprises an actuator, a spacer which can be displaced between an active and an inactive position by the actuator, and a force transmission element which is coupled to the actuator. The force transmission element consists of wire.

Spacer displacement device for a wafer illumination unit and wafer illumination unit

The invention relates to a method and device for expanding the travel or control displacement of linear actuators that is available during an imprinting or embossing stroke. The wedge error compensating head () comprises a movable part (), a stationary part () and at least three linear actuators (). Each linear actuator () is connected to one of the parts () at one end and to the other of the two parts () by wedges () at the other end. By means of the wedges (), it is possible to coarsely or roughly compensate for wedge errors and possible tolerances of individual subcomponents of the system. The linear actuators () are only used for fine or precision compensation for the wedge error. In this way, sufficient control displacement is available for the imprinting stroke with the linear actuators.

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Munich, Germany

Matthias Conradi