Panasonic Corporation

Masaya Watanabe

Akira Kabeshita

Shinjiro Tsuji

Ryouichirou Katano

Keiji Fujiwara

Sakae Kobayashi

A substrate cleaning apparatus for cleaning a front-side clean target surfacea and a back-side clean target surfaceb of a edge portion of a substrateby wiping surfacesa,b of a cleaning tape. The substrate cleaning apparatus includes a presser membera for pressing the cleaning tapeagainst the clean target surfacea, a presser memberb for pressing the cleaning tapeagainst the clean target surfaceb, a tape path passing through between the presser membera and the clean target surfacea and between the presser memberb and the clean target surfaceb, a moving device for moving the cleaning tapeand the substraterelative to each other in a longitudinal direction of the edge portion.

Substrate cleaning apparatus and method employed therein

A board terminal cleaning apparatus for cleaning a terminal portion by bringing a cleaning member in contact with the terminal portion of a board comprises a first support member that supports the cleaning member in a first position, a second support member that supports the cleaning member in a second position, a cleaning head that pressurizes part of the cleaning member supported between the first position and the second position by bringing the part in contact with the terminal portion of the board, a support member moving unit that moves the first support member and the second support member in the direction along the terminal portion, and a cleaning head moving unit that moves the cleaning head in the direction along the terminal portion at a second movement velocity different from the first movement velocity of the first support member and the second support member by the support member moving unit.

Growing community of inventors

Yamanashi, Japan

Masaya Watanabe