Tokyo Electron Limited

Kawasaki Jukogyo Kabushiki Kaisha

Tokyo University of Agriculture and Technology

Octec, Inc.

Masato Hayashi

Koudai Higashi

Kohei Noguchi

Masami Yakabe

Soichiro Bando

Tatsuya Ohno

Daisuke Kajiwara

Naoki Ikeuchi

Hideo Shite

Makoto Ogata

Mikihiko Kataoka

Takayuki Tokushige

Katsuya Okumura

Naruaki Iida

Takuya Mori

Toshiyuki Matsumoto

Muneo Harada

Toyohisa Tsuruda

Nobuyoshi Koshida

Takami Satoh

Eiichi Sekimoto

Ryouichirou Naitou

Masanori Hamamatsu

Mitsuteru Yano

Junnosuke Maki

Kentaro Yoshihara

Hiroyuki Ide

Masayuki Kajiwara

Shoichiro Hidaka

Seiya Totsuka

Tetsuya Hasebe

Kazuma Tokuyama

Hisashi Fujiwara

Keiichi Enjoji

Kazuya Iwanaga

Hideaki Ezaki

Kazuya Takeda

Yasunori Kujime

Yosuke Kameda

Atsumu Maita

Hirofumi Araki

Boui Ikeda

Ryo Araki

Hirokazu Sakamoto

Kenji Iizuka

Hisaki Ishida

A device includes a chemical solution flow path in which a chemical solution containing polymers flows; a laser beam irradiator configured to irradiate a laser beam to the chemical solution flow path such that an optical path is intersected with a flow direction of the chemical solution in the chemical solution flow path; a light receiving element provided in the optical path passing through the chemical solution flow path; a detector configured to detect, based on a signal output from the light receiving element, an abnormality in a state of polymers corresponding to a majority of the polymers contained in the chemical solution or configured to detect a ratio between a chemical solution containing the polymers and another chemical solution in the chemical solution flow path.

Abnormality detection device of chemical solution, liquid processing device, substrate processing apparatus, abnormality detection method of chemical solution, liquid processing method, and substrate processing method

A substrate processing apparatus configured to process a substrate includes a functional component constituting a part of the substrate processing apparatus; a nozzle, provided on a surface of the functional component, allowing a gas to pass therethrough; a nozzle flow path which is connected to the nozzle of the functional component and through which the gas flows; a flow rate sensor configured to measure a flow rate of the gas flowing through the nozzle flow path; and a controller configured to make a determination upon a state of a distance between an interfering object and the functional component based on a measurement result obtained by the flow rate sensor.

Substrate processing apparatus, state determination method and computer-readable recording medium

A foreign substance detection device includes a flow path unit through which a fluid is flown; an optical system configured to flatten a laser light from a laser source to be lengthened in a direction intersecting with a flow direction of the fluid; a laser light irradiation unit provided such that an optical path intersects with the flow direction and configured to irradiate the laser light into the flow path unit; a light detection unit which is provided on the optical path having passed through the flow path unit and includes light receiving elements arranged in a lengthwise direction of a transversal cross section of the optical path; a foreign substance detection unit configured to compare a signal level corresponding to intensity of light received by each light receiving element with a threshold value and configured to detect the foreign substances based on a comparison result.

Foreign substance detection device and foreign substance detection method

A substrate processing apparatus includes a supply channel through which a liquid to be supplied to a substrate flows; and a foreign substance detecting unit configured to detect a foreign substance in the liquid based on a signal obtained when light, which is near-infrared light, is radiated toward a flow path forming unit constituting a part of the supply channel by a light projector so that light is emitted from the flow path forming unit and a light receiver receives the light emitted from the flow path forming unit.

Substrate processing apparatus and substrate processing method

There is provided a substrate processing apparatus, including: a substrate holder configured to hold a substrate with a surface of the substrate on which a concavo-convex pattern is formed oriented upward; a liquid supply unit configured to supply a processing liquid to the substrate held by the substrate holder to form a liquid film at least in a concave portion of the concavo-convex pattern; a heating unit configured to irradiate the substrate held by the substrate holder or the liquid film with a laser beam for heating the liquid film; and a heating controller configured to control the heating unit, wherein the heating controller controls the heating unit to expose the entire concave portion in a depth direction from the processing liquid by irradiating the laser beam onto the substrate or the liquid film from the heating unit.

A solution supply apparatus is for supplying a treatment solution to a treatment solution discharger which discharges the treatment solution to a treatment object. The solution supply apparatus includes: a supply pipe line connected to the treatment solution discharger; a filter provided on the supply pipe line which filters the treatment solution to remove foreign substances; and a controller. The controller performs a determination of a state of the treatment solution to be supplied to a primary side of the filter and, when the state of the treatment solution is determined to be bad, outputs a control signal for restricting supply of the treatment solution to the primary side of the filter.

Solution supply apparatus and solution supply method

A foreign substance detection device includes a flow path unit through which a fluid is flown; an optical system configured to flatten a laser light from a laser source to be lengthened in a direction intersecting with a flow direction of the fluid; a laser light irradiation unit provided such that an optical path intersects with the flow direction and configured to irradiate the laser light into the flow path unit; a light detection unit which is provided on the optical path having passed through the flow path unit and includes light receiving elements arranged in a lengthwise direction of a transversal cross section of the optical path; a foreign substance detection unit configured to compare a signal level corresponding to intensity of light received by each light receiving element with a threshold value and configured to detect the foreign substance based on a comparison result.

According to one embodiment of the present disclosure, there is provided a substrate processing apparatus comprising: a supply passage through which fluid supplied to a substrate flows; and a foreign substance detector including a channel forming part forming a portion of the supply passage, a light projector irradiating light to the channel forming part, and a light receiver receiving light emitted from the channel forming part as a result of irradiating light to the channel forming part by the light projector, the foreign substance detector being configured to detect a foreign substance in the fluid based on a signal obtained by the light that the light receiver receives, wherein the light projector and the light receiver in the foreign substance detector are disposed in areas that are not opposite to each other in areas in upper, lower, left, right, front and rear directions of the channel forming part.

Substrate processing apparatus, substrate processing system, and substrate processing method

An apparatus includes flow path unitsA toK configured to form flow pathsA toK through which a fluid supplied to a target object W is flown; a laser light irradiatorconfigured to irradiate a laser light into the flow path units such that an optical path intersects with a flow direction of the fluid in the flow path units; light receiving elementsA andB provided at the optical path having passed through the flow path units; a detectorconfigured to detect the foreign substance in the fluid based on a signal from the light receiving elements; and a filter unitprovided at the optical path between the light receiving elements and the flow path units, and configured to block a Raman scattered light and allow a Rayleigh scattered light to be transmitted to the light receiving elements.

Foreign substance detection device, foreign substance detection method and recording medium

A power system of a ship includes a first power storage device, a second power storage device, and a control system. The first power storage device has an energy density higher than that of the second power storage device. The second power storage device has a power density higher than that of the first power storage device. The control system is configured to: as a power generator application, prioritize discharging the first power storage device over discharging the second power storage device, such that base power is continuously supplied to an onboard electrical load connected to an onboard bus; and as a grid stabilization application, prioritize charging/discharging the second power storage device over charging/discharging the first power storage device to compensate for frequency variation or voltage variation of an onboard power grid.

Power system of ship

A power storage system supplies electric power to a load, and includes: a secondary battery; a capacitor connected in parallel to the secondary battery; and a controller performing control to prioritize charging and discharging of the capacitor over charging and discharging of the secondary battery.

Power storage system and method of controlling the same

A treatment solution supply method of supplying a treatment solution to a substrate, the method includes the steps of: applying a DC voltage to the treatment solution; detecting a potential difference between two points in the treatment solution in a state where the DC voltage is applied to the treatment solution; and increasing the DC voltage when the detected potential difference is less than a predetermined reference value.

Treatment solution supply method, treatment solution supply apparatus, and non-transitory computer-readable recording medium

In a power storage system, a bidirectional DC-DC converter is set into mode for charging a secondary battery with electricity when a first state of charge (SOC) of the secondary battery is larger than a minimum value of the first SOC, and a second SOC of the capacitor is smaller than a maximum value of the second SOC, and the converter is set into mode for discharging electricity from the secondary battery when the first SOC is smaller than a maximum value of the first SOC, and the second SOC is larger than a minimum value of the second SOC. Based on an internal resistance of the secondary battery, the second SOC, a voltage of a direct current link in case of no load connected to DC link, and an error in a current on a direct current link side, a conduction ratio (D) of the converter is calculated.

Temperature control apparatus for electricity storage device for use in electricity storage system including electricity storage devices

A substrate transport apparatus for detecting with high accuracy rubbing between a substrate held in a substrate holding tool, and a support which transports a substrate. The substrate transport apparatus includes: a stage for placing thereon the substrate holding tool; a substrate transport mechanism including the support for the substrate, and a back-and-forth movement mechanism for moving the support, the mechanism configured to transfer a substrate to/from the substrate holding tool; a lifting mechanism for moving the support up and down with respect to the substrate holding tool; a sound amplifying section for amplifying a contact sound generated by contact between a substrate held in the substrate holding tool and the support; and a detection section for detecting rubbing between a substrate and the support based on a detection signal from a vibration sensor which detects a solid-borne sound, propagating through the substrate holding tool, and outputs the detection signal.

Substrate transport apparatus

Growing community of inventors

Koshi, Japan

Masato Hayashi