Daikin Industries, Ltd.

Other

Toho Kasei Ltd.

Masao Oono

Hiroshi Aihara

Norio Maeda

Koji Sumi

Naoaki Izutani

Takao Matsumoto

Naoaki Izu Tani

A device for drying substrate comprising a processing vessel housing a specified number of substrates such as semiconductor wafers installed erectedly in parallel to one another, a first substrate supporting member supporting substrates within the processing vessel, the processing fluid supplying section supplying to the processing vessel, the processing fluid for performing processing such as cleaning processing on the substrates, a processing fluid exhausting section exhausting processing fluid from the processing vessel, and a drying fluid supplying section supplying, to the processing vessel, the liquid drops of drying fluid for performing drying processing on the substrates.

Method and device for drying substrate

A device for drying substrates which stores a plurality of substrate () and which comprises a processing container () to which cleaning fluid () after cleaning the substrates () is drained and an injection nozzle () for injecting drying fluid located at the terminating part of a feed pipe () through which liquid drying fluid is supplied, whereby an exhaust equipment is eliminated or simplified, and the drying fluid is fed smoothly.

A device for processing a substrate comprises a processing vessel ( ), an outer vessel ( ) for surrounding the processing vessel ( ) which outer vessel ( ) can be sealed, a first supporting member ( ) for bringing the substrate ( ) into and out from the processing vessel ( ) which first supporting member ( ) supports the substrate ( ) in a standing manner, and a second supporting member ( ) for transferring the substrate ( ) between the first supporting member ( ) which second supporting member ( ) is movable up and down within the processing vessel ( ). The device processes the entire surface of the substrate ( ) uniformly and prevents varying in processing from occurrence.

Device for processing wafer

Growing community of inventors

Sakai, Japan

Masao Oono