Dainippon Screen Mfg. Co., Ltd.

Masami Otani

Joichi Nishimura

Masami Nishida

Masahiro Himoto

Akio Tsuchiya

A camera is fixed to a camera fixture extending forward and upward from a rear end of an arm mechanism. The camera picks up the direction of extension of the arm mechanism when the substrate is carried in and out. If a normal still image in a hot plate unit previously recorded and a still image picked up by the camera coincide with each other, a substrate transport robot TR carries in and out the substrate.

Substrate processing apparatus and method including obstacle detection

A wafer transferring device for transferring a wafer to be treated from a wafer supply station of a wafer treating apparatus to a wafer holding member, where the wafer is treated, and from the holding member to a wafer discharge station. The device includes a transfer unit for separately supporting untreated and treated wafers at different heights relative to one another. A carrier unit moves horizontally and reciprocates between the supply and discharge stations and toward and away from the holding member integrally with the transfer unit and is adapted to move up and down the transfer unit.

Wafer transferring device

Two transfer routes for exposed films are provided in a film processor, in one of the two ordinary films which require treatments of developing, stopping, fixing and washing with being transferred, and in the other route wash-off films which require only a treatment of the washing with being transferred. The ordinary films are transferred through the former route with being treated several processes, and the other hand, the wash-off films are directly transferred into a washing tray through the latter route, skipping over treatments of developing, stopping and fixing. The by-pass mechanism for wash-off films can be swinged around a shaft, by which the maintenance for the film processor becomes easier. Processing for different kinds of films can be performed, depending on the kind of films to be processed, with a film processor.

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Kyoto, Japan

Masami Otani