Kabushiki Kaisha Toshiba

Tokyo Shibaura Denki Kabushiki Kaisha

Shibaura Mechatronics Corporation

Masakazu Hayashi

Shinji Nakata

Susumu Yahagi

Fumihiko Ishida

Junzou Utida

The brittle workpiece splitting systemincludes a substrate holding mechanismfor holding a substrate, and a processing unitfor splitting the substrateheld by the substrate holding mechanismby a splitting process. The substrate holding mechanismhas an edge damperadapted to clamp an edge part of the substratefrom the sides of the opposite surfaces of the edge part, and support membersfor supporting the substratethereon at a predetermined height. The support membersare disposed on the side opposite the side of the edge damperwith respect to the intended split lineparallel to the edge part of the substrate. The edge damperhas an edge holderon which the substrateis seated, and a pressure barfor pressing the substrateagainst the edge holderto hold the substratebetween the edge holderand the pressure bar. Resin membersandmade of an elastic material having comparatively high rigidity are attached to parts, to be brought into contact with the substrate, of the pressure barand the edge holder, respectively. The support membersare made of a low-friction material to permit the horizontal movement of the substrateduring the splitting process.

Brittle workpiece splitting system and brittle workpiece splitting method

A charge amount measurement method comprises: interposing a measurement subject between a first substance and a second substance having a through hole; measuring a first collision position where a charged beam passed through the through hole and vicinity of the measurement subject collides against the first substance, in a state that there is no potential difference between the first substance and the second substance, measuring a second collision position where a charged beam passed through the through hole and vicinity of the measurement subject collides against the first substance, in a state that there is a potential difference between the first substance and the second substance, and measuring a charge amount of the measurement subject based on a difference between the measured first collision position and the measured second collision position.

Charge amount measurement method, shift value measurement method of charged beam, charge amount measuring device and shift value measuring device of charged beam

A microscope apparatus includes a microscope body having a mounting section. An observation unit is removably fitted to the mounting section, and includes an objective lens unit and a tip unit. The lens unit has an objective lens opposed to an observation surface and forms an optical image of the surface viewable through the microscope body. The tip unit includes a support member attached to the mounting section, and a glass plate supported by the support member to be located between the objective lens and the observation surface. A fine conductive tip is fixed to the glass plate and extends therefrom toward the observation surface, in the direction of an optical axis of the objective lens. A piezoelectric section for shifting the glass plate is fixed to the support member.

Microscope apparatus

An image information output apparatus has a position specifying section for generating a cursor line signal intended to cause two vertical cursor lines to be displayed superposed upon a picture image corresponding to an image signal of an ITV camera, and an integrator for integrating image signal components corresponding to a region between the cursor lines. The integration output signal of the integrator is converted into a measured line picture image signal, which is displayed on a monitor television device together with the picked-up image.

Growing community of inventors

Yokohama, Japan

Masakazu Hayashi