Nsk Corporation

Mitsubishi Gas Chemical Company, Inc.

Nakanishi Metal Works Co., Ltd.

Masahide Matsubara

Kunio Fukuda

Akiyoshi Honda

Toshiyuki Suzuki

Hiroyuki Sawai

Eiichi Kawamura

Akiyoshi Yamaguchi

Fukuji Kikkawa

Taketo Maruyama

Takashi Nakamura

Yuuichi Sugano

Kunio Yube

Satoshi Okabe

Kazuyo Narita

Satoshi Tamai

Tomoyuki Adaniya

Toshihiro Nomura

Seiji Naito

Teruo Nagao

The present invention relates to an etching solution for a multilayer thin film containing a copper layer and a molybdenum layer, and a method of etching a multilayer thin film containing a copper layer and a molybdenum layer using the etching solution. There are provided an etching solution for a multilayer thin film containing a copper layer and a molybdenum layer, including (A) an organic acid ion supply source containing two or more carboxyl groups and one or more hydroxyl groups in a molecule thereof, (B) a copper ion supply source and (C) an ammonia and/or ammonium ion supply source, the etching solution having a pH value of from 5 to 8, and an etching method using the etching solution.

Etching liquid for film of multilayer structure containing copper layer and molybdenum layer

Disclosed is a stripping agent that can easily strip a photoresist residue and the like at a low temperature in a short time and, at the same time, does not corrode a wiring material at all and has no need to use an organic solvent such as alcohol as a rinsing liquid. The stripping agent disclosed herein comprises 5 to 50% by mass of a specific amine, 30 to 65% by mass of a specific acid amide, 0.1 to 15% by mass of a saccharide or a sugar alcohol, and 1 to 64.5% by mass of water.

Photoresist stripping agent composition

An etching composition which comprises at least one organic carboxylic acid compound selected from acetic acid, propionic acid, butyric acid, succinic acid, citric acid, lactic acid, malic acid, tartaric acid, malonic acid, maleic acid, glutaric acid, aconitic acid, 1,2,3-propanetricarboxylic acid and ammonium salts of these acids, a polysulfonic acid compound and water, and an etching process which comprises etching a conductive film comprising zinc oxide as the main component using the etching composition described above.

Etching composition and etching process

A roller cage made of metal for holding rollers of a roller bearing, includes: separation bars separately defining a plurality of window holes along a peripheral direction of the bearing with a constant interval thereamong. The window holes respectively receive said rollers therein. Each of the separation bars includes: a contact surface being formed by press-molding one of an outer diameter surface side end portion and an inner diameter surface side end portion thereof, and contacting with the rolling surface of the roller; and an expansion portion expanding to a radial direction of the bearing at the other of the outer diameter surface side end portion and the inner diameter surface side end portion which is not subjected to the press-molding.

Method of making roller cage for roller bearing

Roller cage for roller bearing

A self aligning roller bearing with retainer comprises an outer ring having an outer ring raceway in a shape of a spherical concave surface with a single center, an inner ring having a pair of inner ring raceways opposite to the outer ring raceway, a plurality of convex rollers provided rotatable between the outer ring raceway and the inner ring raceway, and a pair of retainers comprising a main portion formed in a hollow cylindrical frustum shape and having a plurality of crossbars, an outwardly flanged portion extending radially outward from the larger diameter end of the main portion and an inwardly flanged portion extending radially inward from the smaller diameter end of the main portion, and connected to the outwardly flanges portion by the crossbars so as to form a plurality of pockets each defined by two of the crossbars and outwardly and inwardly flanged portions to receive one of the convex rollers, the outwardly flanged portion having protrusions each protruding towards the pocket so as to rub against or be in close proximity to the first end face of the convex rollers, and the protrusions having an end face for guiding each of the convex rollers retained inside the respective pockets.

Self-aligning roller bearing with retainer

In a self-aligning roller bearing providing an outer race, an inner race, a plurality of barrel-shaped rollers, and a pair of cages, guide surfaces formed on outward flange portions of the cages for guiding the barrel-shaped rollers are caused to come closer to ends of the barrel-shaped rollers, so that the barrel-shaped rollers can be guided without fail even if an axial load is received. Therefore, the barrel-shaped rollers are prevented from being skewed, from increasing in torque required for rotating the barrel-shaped rollers, and from seizing up the barrel-shaped rollers.

Self-aligning roller bearing with cage

Growing community of inventors

Tokyo, Japan

Masahide Matsubara