Fuji Electric Co., Ltd.

Masahide Gotoh

Shun-ichi Nakamura

Yasuyuki Kawada

Takeshi Tawara

Yoshiyuki Yonezawa

In a silicon carbide semiconductor device in which a contact electrode is formed on a single-crystal silicon carbide semiconductor substrate, a barrier metal (titanium nitride layer) covers an interlayer insulating film in a region other than a contact hole, and a contact electrode of a predetermined electrode material is formed only in a region on the silicon carbide semiconductor substrate in the contact hole opened in the interlayer insulating film on the silicon carbide semiconductor substrate. A top of the barrier metal is covered by a metal electrode (wiring layer) and no nickel metal aggregates are present between the barrier metal and the metal electrode.

Contact to silicon carbide semiconductor device

A silicon carbide semiconductor switching device having a planar metal oxide semiconductor insulated gate structure. The silicon carbide semiconductor switching device includes a silicon carbide semiconductor substrate having a bandgap wider than that of silicon, a drift layer formed on the silicon carbide semiconductor substrate, a base region selectively formed in the drift layer at a top surface thereof, a source contact region selectively formed in the base region at a top surface thereof, a trench formed in the drift layer at the top surface thereof, the trench having a depth that is shallower than a depth of the source contact region, a gate electrode embedded in the trench, a top surface of the gate electrode being substantially flush with a top surface of the source contact region, and an interlayer insulating film formed on the top surfaces of the source contact region and the gate electrode.

Silicon carbide semiconductor switching device and method of manufacturing silicon carbide semiconductor switching device

A silicon carbide semiconductor element and a manufacturing method thereof are disclosed in which a low contact resistance is attained between an electrode film and a wiring conductor element, and the wiring conductor element is hardly detached from the electrode film. In the method, a nickel film and a nickel oxide film are laminated in this order on a surface of an n-type silicon carbide substrate or an n-type silicon carbide region of a silicon carbide substrate, followed by a heat treatment under a non-oxidizing condition. The heat treatment transforms a portion of the nickel film into a nickel silicide film. Then, the nickel oxide film is removed with hydrochloric acid solution, and subsequently, a nickel aluminum film and an aluminum film are laminated in this order on a surface of the nickel silicide film.

Silicon carbide semiconductor element, method of manufacturing the same, and silicon carbide device

A silicon carbide MOS semiconductor device is disclosed which suppresses degradation of efficiency percentage yield with respect to a breakdown voltage even when a surface region with a high impurity concentration is formed by ion implantation with such a high dose as required for attaining a good ohmic contact. The device has a silicon carbide semiconductor substrate, a voltage blocking layer of a first conductivity type formed on the substrate, a body region of a second conductivity type formed on the voltage blocking layer, a body contact region of the second conductivity type formed in a surface region of the body region by selective ion implantation, a surface of the body contact region having such a high impurity concentration as to impart an ohmic contact, a source contact region of the first conductivity type formed in a surface region of the body region by selective ion implantation, a surface of the source contact region having such a high impurity concentration as to impart an ohmic contact, and a source extension region with an impurity concentration lower than that in the source contact region under the source contact region at a region deeper than a tail part of a bottom region of the source contact region by selective ion implantation, the source extension region having an impurity concentration less than 3&#xd7;10cm.

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Matsumoto, Japan

Masahide Gotoh