Fei Comapny

Martin Verheijen

Pleun Dona

Bart Jozef Janssen

Remco Schoenmakers

Erik Michiel Franken

Yuchen Deng

Hendrik Nicolaas Slingerland

Uwe Luecken

Holger Kohr

Maximus Theodorus Otten

Gerbert Jeroen Van De Water

Laurens Franz Taemsz Kwakman

Hervé-William Rémigy

Andreas Voigt

Stephanus Hubertus Leonardus Van Den Boom

Abigaël Adriana Maria Kok

Max Otten

Els Kok

The invention relates to a method of imaging a sample, said sample mounted on a sample holder in an electron microscope, the electron microscope comprising an electron source for generating a beam of energetic electrons along an optical axis and optical elements for focusing and deflecting the beam so as to irradiate the sample with a beam of electrons. The sample holder is capable of positioning and tilting the sample with respect to the electron beam. The method comprises the step of acquiring a tilt series of images by irradiating the sample with the beam of electrons, and concurrently changing a position of the sample during acquisition of the images, so that each image is acquired at an associated unique tilt angle and an associated unique position.

Method of imaging a sample using an electron microscope

A method of calibrating a Scanning Transmission Charged-Particle Microscope, operable in

Method of calibrating a scanning transmission charged-particle microscope

A method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier. The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier. The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals, showing metals with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.

Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus

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Geldrop, Netherlands

Martin Verheijen