Carl Zeiss Smt Gmbh

Martin Scheid

Jochen Hetzler

Hans Michael Stiepan

Frank Eisert

Alexander Winkler

A diffractive optical element () for a test interferometer () measures a shape of an optical surface (). Diffractive shape measuring structures () are arranged on a used surface () of the element and generate a test wave () irradiating the surface when the element is arranged in the interferometer. At least one test field () several profile properties of test structures contained in the test field. The profile properties characterize a profile line of the test structures extending transversely with respect to the used surface and include a flank angle of the profile line, a profile depth and a depth of a microtrench in a bottom region of a trench-shaped profile of the test structures. The test field is arranged at one location of the used surface instead of the diffractive shape measuring structures such that the test field is surrounded by several diffractive shape measuring structures.

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Aalen, Germany

Martin Scheid