Average Co-Inventor Count = 10.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl-zeiss-smt Ag (2 from 461 patents)
2. Carl Zeiss Smt Gmbh (1 from 1,410 patents)
3 patents:
1. 8767181 - Microlithographic exposure method as well as a projection exposure system for carrying out the method
2. 7847921 - Microlithographic exposure method as well as a projection exposure system for carrying out the method
3. 7408616 - Microlithographic exposure method as well as a projection exposure system for carrying out the method