Stellarray, Incorporated

Other

Stellar Micro Devices

Stellarray, Incorporaated

Stellar Display Corporation

Mark F Eaton

Curtis Nathan Potter

Mark E Lucente

Andrew Carl Miner

Mike Olla

Robert J Hollingsworth

Mitali More

Leonid Danielovitch Karpov

Leonid D Karpov

An efficient source of EUV or SXR flux uses multiple e-beams from multiple cathodes to impact a wide anode target with a flux-generating surface to generate flux over a wide area. The conversion efficiency of e-beam power to flux power may be improved by the direction of the e-beams towards the anode target at shallow or grazing incidence angles or the use of mirrored anode surfaces which reflect EUV or SXR. The source is enclosed in a vacuum chamber and performs work such as the penetration of photoresist on a semiconductor wafer in vacuum.

Multi-cathode EUV and soft x-ray source

This invention provides a source of x-ray flux in which x-rays are produced by e-beams impacting the inner walls of holes or channels formed in a metal anode such that most of the electrons reaching the channel impact an upper portion of said channel. A portion of the electrons from this primary impact will generate x-rays. Most of the electrons scatter but they continue to ricochet down the channel, most of them generating x-rays, until the beam is spent. A single channel source of high power efficiency and high power level x-rays may be made in this way, or the source can be of an array of such channels, to produce parallel collimated flux beams of x-rays.

Forward flux channel X-ray source

The present disclosure describes a self-contained irradiator comprising at least one X-ray source inside a shielded enclosure, the one or more sources each operable to emit X-ray flux across an area substantially equal to the proximate facing surface area of material placed inside the enclosure to be irradiated. The irradiator may have multiple flat panel X-ray sources disposed, designed or operated so as to provide uniform flux to the material being irradiated. The advantages of the irradiator of the present disclosure include compactness, uniform flux doses, simplified thermal management, efficient shielding and safety, the ability to operate at high power levels for sustained periods and high throughput.

Self contained irradiation system using flat panel X-ray sources

A pipe source of UV flux has an inner pipe made of UV transmissive material and coated on its outer surface with a UV emitting phosphor. An outer pipe has a cathode array disposed on or near its inner surface, such as an array of thermionic filament cathodes mounted longitudinally or transverse to the length of the pipe, cold cathode arrays formed on the inner surface of the pipe or cold cathode arrays formed on separate substrates which are then attached to the inner surface of the outer pipe. The ends of this two-pipe assembly are hermetically sealed with flanges or end plates at either end of the pipe and evacuated to a pressure below 1&#xd7;10Torr. Internal spacing rings may be used to provide additional separation between the inner and out pipes. Current from the cathode arrays is accelerated by an anode voltage to strike the UV phosphors when then emit UV light flux which illuminates the inside of the pipe and the fluid material flowing through the inner pipe.

UV pipe

A structure and method for cold weld compression bonding using a metallic nano-structured gasket is provided. This structure and method allows a hermetic package to be formed at lower pressures and temperatures than are possible using bulk or conventional thin-film gasket materials.

Nano-structured gasket for cold weld hermetic MEMS package and method of manufacture

A radiation source which can emit X-ray flux using electron beam currents from a cathode array formed on the window through which the radiation will exit the source. The source can be made in formats which are compact or flat compared with prior art radiation sources. X-ray flux produced by the source can be used for such purposes as radiation imaging, sterilization, decontamination of biohazards or photolithography.

Flat panel X-ray source

A multiple liquid and solids dispenser apparatus and method includes a solids dispenser for holding and dispensing solids. A liquid dispenser is connected to the solids dispenser and the liquid dispenser contains more than one liquid and is positioned so as to dispense the more than one liquid on the solid or not on the solid as desired.

Multiple liquid and solids dispenser apparatus and method

A method for fabricating a thin-film edge emitter device includes the steps of providing a first conductive layer having a top surface; providing an insulating layer having a top surface disposed above the top surface of the first conductive layer; providing a second conductive layer on the insulating layer; and providing a well in the insulating layer over the first conductive layer and an edge in the second conductive layer proximate the well. Providing the well and the edge includes processing the first conductive, insulating, and second conductive layers by at least one of lift-off processing, photolithography processing, and processing with the use of a pre-formed insulating layer having at least one opening associated with a location of the well. The first conductive layer forms an anode. Lastly, the second conductive layer forms at least one of a cladded cathode having an emissive edge and a control electrode.

Method of fabricating a field emission device with a lateral thin-film edge emitter

A liquid and solid dispenser apparatus and method having a motor, a timer, a feed dispenser and a scent dispenser. The liquid dispenser of one embodiment utilizes suction created on the hollow motor shaft and a hollow shaft extension, extending into a scent dispenser filled with scent, once the outlets begin to spin by way of operation of the motor and the motor shaft, so that centrifugal force dispenses scent from the outlets and draws the fluid through the shaft. As a result, scent is deposited on feed which are both dispersed at the same time. Another embodiment utilizes a torus shaped ring for containing scent attached to the top of the motor shaft, thereby eliminating the shaft extension. As the torus shaped dispenser is rotated the scent is mixed and is dispersed through flow plugs. Depending on the size of the removable attachable flow plugs used, more or less scent can be disbursed by this method. This embodiment has the advantage of creating a vacuum inside the dispenser that sucks air back into it and cleans the plugs once the operating cycle is completed. A further embodiment utilizes wicks instead of flow plugs so that scent is dispensed immediately upon rotation and additionally, when not rotating, scent in small amounts is dispensed on a continuous basis.

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Austin, TX, United States of America

Mark F Eaton