International Business Machines Corporation

Nova Corporation

Marjorie Cheng

Dexin Kong

Igor Turovets

Daniel Schmidt

Aron Cepler

Roy Koret

A method, a system, and a non-transitory computer readable medium for measuring a local critical dimension uniformity of an array of two-dimensional structural elements, the method may include obtaining an acquired optical spectrometry spectrum of the array; feeding the acquired optical spectrometry spectrum of the array to a trained machine learning process, wherein the trained machine learning process is trained to map an optical spectrometry spectrum to an average critical dimension (CD) and a local critical dimension uniformity (LCDU); and outputting, by the trained machine learning process, the average CD and the LCDU of the array.

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Armonk, NY, United States of America

Marjorie Cheng