Inoex Gmbh Innovationen Und Ausruestungen Fuer Die Extrusionstechnik

Marius Thiel

Ralph Klose

The invention relates to a terahertz measuring apparatus () for run-time measurements of test objects (), in particular, for layer thickness measurements and distance measurements of the test objects (), whereby the terahertz measuring apparatus () comprises: Hereby, it is provided that

Terahertz measuring device and terahertz measuring method for measuring objects to be inspected

The invention relates to a method and a terahertz measuring apparatus for measuring a layer thickness and/or a distance, wherein at least one terahertz beam () is radiated from a terahertz transmission and reception unit () along an optical axis (C) onto the measurement object () and terahertz radiation () that has passed through at least one layer () of the measurement object () and having been reflected is detected wherein a measurement signal (A) of the detected reflected terahertz radiation () is evaluated and a layer thickness (d) is ascertained from a propagation time difference (t&#x2212;t) of the radiation () reflected at boundary layers () of the layer (). In this case, there is a provision for multiple measurements to be performed using different optical axes (C), wherein the optical axis (C) of the emitted terahertz radiation () is adjusted during the measurements or between the measurements and one of the multiple measurements is used for ascertaining the layer thickness (d). Preferably, the optical axis is adjusted continuously and/or periodically within an adjustment angle range (&#x3b1;) and in the process the multiple measurements are recorded, the measurement therefrom with maximum amplitude being used as the measurement for ascertaining the layer thickness.

Terahertz measurement method and terahertz measuring apparatus for ascertaining a layer thickness or a distance of a measurement object

The invention relates to a terahertz measuring device () for measuring a test object (), comprising: a THz transmitter and receiver unit () for emitting terahertz radiation () at a spatial angle of emittance () along an optical axis (A), receiving reflected terahertz radiation () and generating a signal amplitude (S) as a function of the time or frequency (t, f), anda controller and evaluator device () for receiving and evaluating the signal amplitude (S). Hereby, the controller and evaluator device () determines defects () of the test object () from the signal amplitude (S). In particular, it is possible to mask a core area () of the emitted terahertz radiation (). An alternative measuring arrangement can reveal defects also by injecting the THz radiation at a right angle in that additional measuring peaks are detected which cannot be associated with the layer thickness measurement as such.

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Osnabrueck, Germany

Marius Thiel