US Government as Represented by the Secretary of the Army

Lam Research Corporation

Mansa Rajagopalan

Kristopher Allen Darling

Laszlo John Kecskes

Yu Jiang

Kiran N Solanki

Rajiv S Mishra

Adrian Radocea

Nicolas Londono

Yuri Mishin

Gordon Wen-Yin Peng

A consumable part for a plasma processing chamber includes a plasma facing side. An engineered surface is formed into the plasma facing side of the consumable part. A plurality of raised features defines the engineered surface, wherein features are arranged in a predefined pattern, wherein each of the plurality of raised features includes a top region having an outer edge and a sidewall. A base surface of the engineered surface is configured to surround each of the plurality of raised features, such that a corresponding sidewall of a corresponding raised feature extends up at an angle from the base surface to a corresponding top region. The consumable part is configured to be installed in the plasma processing chamber. The consumable part is configured to be exposed to a plasma and byproducts of the plasma.

Macroscopic texturing for anodized and coated surfaces

Novel metallic systems and methods for their fabrication provide an extreme creep-resistant nano-crystalline metallic material. The material comprises a matrix formed of a solvent metal with crystalline grains having diameters of no more than about 500 nm, and a plurality of dispersed metallic particles formed on the basis of a solute metal in the solvent metal matrix and having diameters of no more than about 200 nm. The particle density along the grain boundary of the matrix is as high as about 2 nmof grain boundary area per particle so as to substantially block grain boundary motion and rotation and limit creep at temperatures above 35% of the melting point of the material.

Extreme creep resistant nano-crystalline metallic materials

Growing community of inventors

San Ramon, CA, United States of America

Mansa Rajagopalan