L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude

Manish Khandelwal

Jean-Marc Girard

Peng Zhang

Antonio Sanchez

Gennadiy Itov

Grigory Nikiforov

David Orban

Reno Pesaresi

Methods for producing halosilazane comprise halogenating a hydrosilazane with a halogenating agent to produce the halosilazane, the halosilazane having a formula(SiH(NR)X)N(SiHX),wherein each a, b, c is independently 0 to 3; a+b+c=3; d is 0 to 2 and n&#x2265;1; wherein X is selected from a halogen atom selected from F, Cl, Br or I; each R is selected from H, a C-Clinear or branched, saturated or unsaturated hydrocarbyl group, or a silyl group [SiR']; further wherein each R&#x2032; of the [SiR&#x2032;] is independently selected from H, a halogen atom selected from F, Cl, Br or I, a C-Csaturated or unsaturated hydrocarbyl group, a C-Csaturated or unsaturated alkoxy group, or an amino group [&#x2014;NRR] with each Rand Rbeing further selected from H or a C-Clinear or branched, saturated or unsaturated hydrocarbyl group, provided that when c=0, d&#x2260;0; or d=0, c&#x2260;0.

Si-containing film forming precursors and methods of using the same

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Somerset{grave over ( )}, NJ, United States of America

Manish Khandelwal