Globalwafers Co., Ltd.

Man-Hsuan Lin

Wen-Ching Hsu

Chih-Yuan Chuang

Ching-Shan Lin

Chun-I Fan

Chien-Cheng Liou

Jian-Hsin Lu

Jia-Zhe Liu

Yen-Lun Huang

Shuo-Hung Hsu

Chuan-Wei Tsou

Che-Ming Liu

A silicon carbide crystal includes a seed layer, a bulk layer and a stress buffering structure formed between the seed layer and the bulk layer. The seed layer, the bulk layer and the stress buffering structure are each formed with a dopant that cycles between high and low dopant concentration. The stress buffering structure includes a plurality of stacked buffer layers and a transition layer over the buffer layers. The buffer layer closest to the seed layer has the same variation trend of the dopant concentration as the buffer layer closest to the transition layer, and the dopant concentration of the transition layer is equal to the dopant concentration of the seed layer.

Silicon carbide crystal

A silicon carbide crystal and a method for manufacturing the same are disclosed. The silicon carbide crystal includes a seed layer, a bulk layer, and a stress buffering structure formed between the seed layer and the bulk layer. The seed layer, the bulk layer, and the stress buffering structure are each formed with a dopant that cycles between high and low concentration. Therefore, the crystal defects can be significantly reduced.

Silicon carbide crystal and method for manufacturing the same

A bonded substrate for epitaxial growth and a method for forming the same are disclosed. The method includes steps of providing a first substrate, which has a first dopant concentration; providing a second substrate, which has a second dopant concentration, wherein the second dopant concentration is lower than the first dopant concentration; directly bonding a first surface of the first substrate with a second surface of the second substrate to form a bonded substrate; annealing the bonded substrate to form a high impedance layer in the bonded substrate; and removing part of the second substrate to expose the high impedance layer depending on the requirements whereby, the bonded substrate formed by the method could have a heavily doped substrate which includes a stronger strength and the impedance layer formed thereon, which could effectively increase the substrate strength, reduce the leakage current, and sustains a higher breakdown voltage.

Bonded substrate for epitaxial growth and method of forming the same

An epitaxial substrate and a method for forming the same are disclosed. The epitaxial substrate includes a substrate, a deposition layer, a buffer layer and an epitaxial layer. The deposition layer is directly formed on the substrate, wherein the deposition layer includes a gradient doping concentration, and has a first surface and a second surface which are opposite to each other; the gradient doping concentration has a minimum value at the first surface. The buffer layer is formed on the deposition layer, and an epitaxial layer is formed on the buffer layer. The epitaxial layer is mainly formed of group III-V nitride. The substrate and the deposition layer are formed of homogeneous material. Since the deposition layer is directly formed on the substrate, and the deposition layer and the substrate are formed of a homogeneous material, the epitaxial substrate includes a good heat dissipation efficiency and low leakage current.

Epitaxial substrate and method for forming the same

A semiconductor device including a substrate, a semiconductor layer, and a buffer structure is provided. The semiconductor layer is located on the substrate. The buffer structure is located between the substrate and the semiconductor layer. The buffer structure includes a plurality of first layers and a plurality of second layers. The first layers and the second layers are alternately stacked with a same pitch or different pitches.

Semiconductor device and method of forming the same

An epitaxial substrate and a method of manufacturing the same are provided. The epitaxial substrate includes a handle substrate, a heat dissipation layer on the handle substrate, a high-resistance silicon substrate on the heat dissipation layer, and a III-V semiconductor layer grown on the high-resistance silicon substrate. The heat dissipation layer has high thermal conductivity. The high-resistance silicon substrate has a resistance more than 100 ohm&#xb7;cm. Diameters of the high-resistance silicon substrate and the III-V semiconductor film are smaller than a diameter of the handle substrate, such that the epitaxial substrate is a convex substrate.

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Hsinchu, Taiwan

Man-Hsuan Lin