Disco Corporation

Mai Haneda

Takenobu Mori

Atsushi Nakatsuka

Stored is a height of a grinding mechanism when lower surfaces of grinding stones have come into contact with an upper surface of a wafer held on a holding surface, through lowering of the grinding mechanism from above the wafer. Based on this height, an origin point height which is a height of the grinding mechanism when the lower surfaces of the grinding stones have come into contact with the holding surface is then determined.

Growing community of inventors

Tokyo, Japan

Mai Haneda