Gigalane Co., Ltd.

Withwave Co., Ltd.

Maeng Youl Lee

Yong Goo Lee

Sung Jin Kim

Jeong Il Jeon

Min Su Park

Disclosed is a calibration apparatus for a network analyzer, including a communication portion configured to communicate with the network analyzer to input or output data necessary for calibration, a signal input portion configured to receive a signal notifying a start of the calibration input, at least one radio frequency (RF) port for being connected to the network analyzer, at least one adaptor configured to connect the RF port with the network analyzer, an impedance circuit portion connected to the RF port and configured to include at least one standard impedance, and a controller portion configured to generate calibration data using adaptor characteristic data corresponding to electrical characteristic of the adaptor, measurement data obtained by connecting each of such standard impedances with the network analyzer, and standard impedance characteristic data corresponding to the standard impedance.

Calibration apparatus and method for network analyzer

There is provided a probe block comprising a probe including first contact portions, second contact portions, and beams connecting the first contact portion to the second contact portion and a guide where the probe is inserted and supported, wherein the probe block is installed in a probe card for inspecting a semiconductor chip.

Probe block

A probe card of a semiconductor test apparatus having a plurality of space transformers supporting probe units of the probe card is provided. A probe card of the present invention includes a plurality of probe units, each comprising a guide member and at least one probe secured by the guide member and contacting a chip pad to be tested; a plurality of space transformers arranged below the respective probe units, each space transformer having wires electrically connected to lower terminals of the probes; a frame having a plurality of guide holes for fixedly positioning the respective probe units; an interposer array arranged below the space transformers for supporting the space transformers, interposer array comprising electrical connection means for supplying test signals to the wires of the space transformers; and a printed circuit board arranged below the interposer array for supporting the interposer array and electrically connected to the electrical connection means for supplying the test signals. In the probe card of the present invention, the probe units are independently supported by respective space transformers such that it is possible to reduce thermal distortion of the probe card and simplifying the manufacturing and repairing processes.

Probe card having a plurality of space transformers

A probe block mounted on a probe card is provided for achieving fine pitch probes. A probe block for a probe card of a semiconductor test device according to the present invention includes a guide member and a probe. A guide member includes pairs of upper and lower holes and middle holes each interconnecting the upper and lower holes of each pair. A probe includes a first pin tip protruded through a corresponding upper hole for contacting a pad of a device to be tested and a second pin tip protruded through a corresponding lower hole for transferring an electrical signal to the device and a bridge part situated within the middle hole for interconnecting the first and second pin tips. The upper, lower, and middle holes allow the probe to elastically moves in vertical direction. The probe block of the present invention is advantageous in that the probes are supported by guide members so as not to be bent while maintaining a fine pitch. Also, the probe block of the present invention is advantageous in fabrication and repair since probes are elastically contacted rather than directly bonded to the circuit substrate of the probe card.

A coaxial connecting device is provided for making an electrical connection between a coaxial cable and a device under test. A coaxial connecting device electrically connects a coaxial cable to a signal pad and a ground pad. The coaxial contractor of the present invention includes a signal pin for electrically connecting a signal conductor of the coaxial cable to the signal pad; a ground connector for electrically connecting a ground conductor of the coaxial cable to the ground pad; a cylindrical guide tube surrounding the ground conductor for elastically contacting the ground connector while maintaining a predetermined distance with the signal pin; and a dielectric member surrounding a part of the signal pin for electrically isolating the cylindrical guide tube and the signal pin from each other and coaxially maintaining the guide tube and the signal pin. The coaxial connecting device of the present invention minimizes a contact path between the ground conductor of a coaxial cable and a ground pad and provides impedance matched coaxial signal transmission link, resulting in improvement of frequency characteristics.

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Seoul, South Korea

Maeng Youl Lee