Mattson Technology, Inc

Mattson Technology Canada, Inc.

Ludmila Shepelev

David Malcolm Camm

Greg Stuart

Steve McCoy

Tilman Thrum

Tony Komasa

Mike Krasnich

Arne Kjorvel

Igor Rudic

Rick Doolan

Tony Hewett

Joseph Reyers

Alex Viel

Chee Chin

An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.

High-intensity electromagnetic radiation apparatus and methods

Apparatus and methods for producing electromagnetic radiation

Growing community of inventors

Richmond, CA, United States of America

Ludmila Shepelev