Alis Corporation

Carl Zeiss Microscopy Gmbh

Carl Zeiss Nts Gmbh

Louis S Farkas, Iii

John Anthony Notte, Iv

Billy W Ward

Randall G Percival

Raymond Hill

Lars Markwort

Dirk Aderhold

Ulrich Mantz

Klaus Edinger

FHM-Faridur Rahman

Lawrence Scipioni

Michael Steigerwald

Shawn McVey

Alexander Groholski

Johannes Bihr

Richard A Comunale

John A Notte

Lewis A Stern

William DiNatale

Ion sources, systems and methods are disclosed.

Ion sources, systems and methods

Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.

Ion beam stabilization

Disclosed herein are methods that include: (a) exposing a sample in a chamber to a first gas, where the first gas reacts with surface contaminants on the sample to form a second gas; (b) removing at least a portion of the second gas from the chamber; and (c) exposing the sample to a charged particle beam to cause a plurality of particles to leave the sample and detecting at least some of the plurality of particles. The charged particle beam can include particles having a molecular weight of 40 atomic mass units or less.

Sample decontamination

In one aspect the invention provides a gas field ion microscope that includes an ion source in connection with an optical column, such that an ion beam generated at the ion source travels through the optical column and impinges on a sample. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the invention provides methods for using the ion microscope to analyze samples and enhancing the performance of a gas field ion source.

Systems and methods for a gas field ion microscope

Growing community of inventors

Durham, NH, United States of America

Louis S Farkas, Iii