Shandong University

Yanshan University

Long Tian

Zhen Wang

Hongtao Zhu

Chuanzhen Huang

Jun Wang

Bin Zou

Peng Yao

Hanlian Liu

Shuiquan Huang

Longhua Xu

Dun Liu

Zhenyu Shi

Meina Qu

Yabin Guan

Zhengkai Xu

Minting Wang

A single-crystal &#x3b2;-GaOMSM detector and a preparation method thereof, comprising: machining grooves on a single-crystal &#x3b2;-GaOsubstrate using a laser-assisted waterjet machining technique to form a 3D shape; wet etching the machined single-crystal &#x3b2;-GaOsubstrate using an HF solution to remove machining damage; performing Au evaporation on a surface of the single-crystal &#x3b2;-GaOsubstrate after processing, coating an Au thin film on the surface of the single-crystal &#x3b2;-GaOsubstrate; and grinding the surface of the single-crystal &#x3b2;-GaOsubstrate after evaporation to remove the Au thin film on an undressed surface and retain the Au thin film in the grooves, and then obtaining the single-crystal &#x3b2;-GaOMSM detector.

Single-crystal beta-GaOMSM detector and preparation method thereof

Growing community of inventors

Jinan, China

Long Tian