Centre National De La Recherche Scientifique

Ecole Polytechnique

Total Sa

Total Marketing Services

Linwei Yu

Pere Roca I Cabarrocas

A method for the low-temperature production of radial electronic junction semiconductor nanostructures on a substrate, includes: a) forming on the substrate, metal aggregates capable of electronically doping a first semiconductor material; b) growing, in the vapor phase, doped semiconductor nanowires in the presence of one or more non-dopant precursor gases of the first semiconductor material, the substrate being heated to a temperature at which the metal aggregates are in the liquid phase, the growth of the doped semiconductor nanowires in the vapor phase being catalyzed by the metal aggregates; c) rendering the residual metal aggregates inactive; and d) the chemical vapor deposition, in the presence of one or more precursor gases and a dopant gas, of at least one thin film of a second semiconductor material so as to form at least one radial electronic junction nanostructure between the nanowire and the at least one doped thin film.

Method for the low-temperature production of radial-junction semiconductor nanostructures, radial junction device, and solar cell including radial-junction nanostructures

Fabricating semiconductor nanowires () on a substrate () having a metallic oxide layer (), includes: a) exposing the metallic oxide layer to a hydrogen plasma () of power P for a duration t suitable for reducing the layer and for forming metallic nanodrops () of radius (R) on the surface of the metallic oxide layer; b) low temperature plasma-assisted deposition of a thin layer () of a semiconductor material on the metallic oxide layer including the metallic nanodrops, the thin layer having a thickness (H) suitable for covering the metallic nanodrops; and c) thermal annealing at a temperature T sufficient to activate lateral growth of nanowires by catalysis of the material deposited as a thin layer from the metallic nanodrops. Nanowires are obtained by this method and nanometric transistors including a semiconductor nanowire.

Growing community of inventors

Palaiseau, France

Linwei Yu