Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Screen Holdings Co., Ltd. (2 from 1,111 patents)
2 patents:
1. 12459010 - Substrate processing method and substrate processing apparatus
2. 11919049 - Substrate processing method and substrate processing apparatus