Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Vistec Semiconductor Systems Gmbh (1 from 64 patents)
1 patent:
1. 7584072 - Method for determining correction values for the measured values of positions of structures on a substrate