Average Co-Inventor Count = 5.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asm International N.v. (2 from 313 patents)
2 patents:
1. 7966969 - Deposition of TiN films in a batch reactor
2. 7732350 - Chemical vapor deposition of TiN films in a batch reactor