Taiwan Semiconductor Manufacturing Comp. Ltd.

Compal Electronics, Inc.

National Cheng-Kung University

Li-Hsin Wang

Hsin-Chang Lee

Chia-Jen Chen

Kuan-Wen Lin

Chen-Yang Lin

Da-Wei Yu

Jui-Hung Hsu

Yi-Da Chen

Ping-Yueh Hsieh

Jhu-Jyun Chang

Hou-Lung Lin

Ding-Bang Luh

Chi-Hua Wu

A photolithographic apparatus includes a particle removing cassette, a pump and a compressor. The particle removing cassette includes a first slit that includes an array of parallel wind blade nozzles arranged along a length of the first slit, protruding from the first slit, and configured to eject and direct pressurized cleaning material to a patterning surface of a mask to remove debris particles on the patterning surface. The pump and the compressor are controlled by a controller to adjust a flow rate and a pressure of the pressurized cleaning material based on an amount of debris particles on the patterning surface of the mask.

Particle removing assembly and method of cleaning mask for lithography

An photolithographic apparatus includes a particle removing cassette selectively extendable from the processing apparatus. The particle removing cassette includes a wind blade slit and an exhausting slit. The wind blade slit is configured to direct pressurized cleaning material to a surface of the mask to remove the debris particles from the surface of the mask. The exhausting slit collects the debris particles separated from the surface of the mask and contaminants through the exhaust line. In some embodiments, the wind blade slit includes an array of wind blade nozzles spaced apart within the wind blade slit. In some embodiments, the exhausting slit includes array of exhaust lines spaced apart within the exhausting slit.

An electronic device is provided. The electronic device includes a printed circuit board (PCB), an antenna structure, a radio frequency signal transceiving circuit and a testing structure. The antenna structure is disposed on the PCB. The radio frequency signal transceiving circuit is disposed on the PCB, and is connected to the antenna structure through a conductive line. The testing structure includes a testing point and a grounding structure. The testing point is disposed on the conductive line, and the grounding structure is disposed on the PCB.

Electronic device and testing system

Faucet

Growing community of inventors

Taipei, Taiwan

Li-Hsin Wang