Spansion Llc.

Cypress Semiconductor Corporation

Advanced Micro Devices Corporation

Globalfoundries Inc.

Lei Xue

Angela Tai Hui

Hidehiko Shiraiwa

Ching-Huang Lu

Rinji Sugino

Simon Siu-Sing Chan

Kuo-Tung Chang

Kenichi Ohtsuka

Scott Allan Bell

Shenqing Fang

Youseok Suh

Simon S Chan

Ning Cheng

Meng Ding

Huaqiang Wu

Hiro Kinoshita

Hagop A Nazarian

Richard M Fastow

Chun Chen

Chih-Yuh Yang

Chungho Lee

Satoshi Torii

Harpreet Kaur Sachar

Chuan Lin

Bradley Marc Davis

Calvin T Gabriel

Takashi Whitney Orimoto

Amol Ramesh Joshi

Phillip Lawrence Jones

Minghao Shen

Krishnaswamy Ramkumar

Mark W Randolph

Chi K Chang

Wei Zheng

Zhizheng Liu

Joong Jeon

Kuo Tung Chang

Yukio Hayakawa

Jayendra D Bhakta

Gulzar Ahmed Kathawala

Hiroyuki Nansei

Robert Bertram Ogle, Jr

Takayuki Maruyama

Renhua Zhang

Aimin Xing

An approach to use silicided bit line contacts that do not short to the underlying substrate in memory devices. The approach provides for silicide formation in the bit line contact area, using a process that benefits from being self-aligned to the oxide-nitride-oxide (ONO) nitride edges. A further benefit of the approach is that the bit line contact implant and rapid temperature anneal process can be eliminated. This approach is applicable to embedded flash, integrating high density devices and advanced logic processes.

Non-volatile memory with silicided bit line contacts

A semiconductor device having a substrate, a dielectric layer over the substrate, a first gate conductor, an inter-gate dielectric structure and a second gate conductor is disclosed. A gate dielectric structure is disposed between the first gate conductor and the dielectric layer, and may include two or more dielectric films disposed in an alternating manner. The inter-gate dielectric structure may be disposed between the first gate conductor and the second gate conductor, and may include two or more dielectric films disposed in an alternating manner. The second gate conductor is formed in an L shape such that the second gate has a relatively low aspect ratio, which allows for a reduction in spacing between adjacent gates, while maintaining the required electrical isolation between the gates and contacts that may subsequently be formed.

Split-gate semiconductor device with L-shaped gate

An A method for fabricating an integrated circuit (IC) comprising a substrate, a first device, a second device, and a trench in the substrate is described herein. The trench is self-aligned between the first and second devices and comprises a first portion filled with a dielectric material and a second portion filled with a conductive material. The self-aligned placement of the trench provides electrical isolation between the first and second devices and allows for higher packing density without negatively affecting the operation of closely spaced devices in a high density IC.

Self-aligned trench isolation in integrated circuits

A 3-D/vertical non-volatile (NV) memory device such as 3-D NAND flash memory and fabrication method thereof, the NV memory device includes vertical openings disposed in a stack of alternating stack layers of first stack layers and second stack layers over a wafer, a multi-layer dielectric disposed over an inner sidewall of each opening, a first channel layer disposed over the multi-layer dielectric, and a second channel layer disposed over the first channel layer, in which at least one of the first or second channel layers includes polycrystalline germanium or silicon-germanium.

Memory device with multi-layer channel and charge trapping layer

A system and method for providing electrical isolation between closely spaced devices in a high density integrated circuit (IC) are disclosed herein. An integrated circuit (IC) comprising a substrate, a first device, a second device, and a trench in the substrate and a method of fabricating the same are also discussed. The trench is self-aligned between the first and second devices and comprises a first filled portion and a second filled portion. The first fined portion of the trench comprises a dielectric material that forms a buried trench isolation for providing electrical isolation between the first and second devices. The self-aligned placement of the buried trench isolation allows for higher packing density without negatively affecting the operation of closely spaced devices in a high density IC.

An integrated circuit comprises a first poly-silicon region including a first poly-silicon layer, a second poly-silicon layer disposed over the first poly-silicon layer, a first poly-silicon finger associated with the first poly-silicon layer, and a second poly-silicon finger associated with the second poly-silicon layer. The first poly-silicon finger and the second poly-silicon finger are oriented in a substantially orthogonal manner relative to each other. The integrated circuit comprises a second poly-silicon gate region including the first poly-silicon layer. The first polysilicon gate region and the second polysilicon gate region each have different poly-silicon gate structures.

Integrating transistors with different poly-silicon heights on the same die

Providing for a non-volatile semiconductor memory architecture that achieves high read performance is described herein. In one aspect, an array of memory transistors arranged electrically in serial is configured to control a gate voltage of a pass transistor. The pass transistor, in turn, enables current flow between two metal bitlines of the semiconductor memory architecture. Accordingly, a relative voltage or relative current of the two metal bitlines can be measured and utilized to determine a program or erase state of a transistor of the serial array of transistors. In a particular aspect, a transistor with small capacitance is chosen for the pass transistor, resulting in a fast correspondence of the pass transistor gate voltage/current relative to transistor array current. This can equate to fast read times for the transistor array, based on differential sensing of the two metal bitlines.

CT-NOR differential bitline sensing architecture

A system and method for providing electrical isolation between closely spaced devices in a high density integrated circuit (IC) are disclosed herein. An integrated circuit (IC) comprising a substrate, a first device, a second device, and a buried trench in the substrate and a method of fabricating the same are also discussed. The buried trench is positioned between first and second devices and may be filled with dielectric material. Alternatively, the buried trench contains air. A method of using Hydrogen annealing to create the buried trench is disclosed.

Buried trench isolation in integrated circuits

Memory devices having improved TPD characteristics and methods of making the memory devices are provided. The memory devices contain two or more memory cells on a semiconductor substrate and bit line openings containing a bit line dielectric between the memory cells. The memory cell contains a charge storage layer and a first poly gate. The bit line opening extends into the semiconductor substrate. By containing the bit line dielectric in the bit line openings that extend into the semiconductor substrate, the memory device can improve the electrical isolation between memory cells, thereby preventing and/or mitigating TPD.

Oro and orpro with bit line trench to suppress transport program disturb

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Saratoga, CA, United States of America

Lei Xue