Average Co-Inventor Count = 4.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asm Japan K.k. (2 from 194 patents)
2 patents:
1. 6559520 - Siloxan polymer film on semiconductor substrate
2. 6514880 - Siloxan polymer film on semiconductor substrate and method for forming same