Csmc Technologies Fab1 Co., Ltd.

Csmc Technologies Fab2 Co., Ltd.

Le Wang

Zhiyong Zhao

Linchun Gui

Kongwei Zhu

Lili He

A method for fabricating a small-scale MOS device, including: preparing a substrate; forming a first trench in the substrate along a first side of the gate region and forming a second trench in the substrate along a second side of the gate region, the first side of the gate region opposite the second side of the gate region; forming a first lightly doped drain region and a second lightly doped drain region in the first trench and the second trench, respectively; forming a third trench in the substrate overlapping at least a first portion of the first lightly doped drain region and a fourth trench in the substrate overlapping at least a first portion of the second lightly doped drain region; and forming a source region and a drain region in the third trench and the fourth trench, respectively.

Method for fabricating small-scale MOS device

A method is provided for manufacturing a double-gate structure. The method includes providing a substrate and forming a first gate region on a surface of the substrate using a first gate layer. The method also includes forming a second gate layer on the surface of the substrate, wherein the second gate layer covers the first gate region, forming an etch-stop layer on the second gate layer, and forming a silicide layer on the etch-stop layer. The method also includes forming a second gate region, different from the first gate region, containing the second gate layer and the silicide layer without the etch-stop layer. Further, the etch-stop layer is arranged between the second gate layer and the silicide layer to facilitate even etching of the second gate layer around the first gate region.

Method for manufacturing double-gate structures

A Metal-Oxide-Semiconductor Field Effect Transistor (MOSFET) is disclosed. The MOSFET includes a substrate, a well region formed in the substrate, a shallow channel layer, a channel, a gate oxide layer, a gate region, a source region, and a drain region. The shallow channel layer is formed on a portion of the well region and includes a first shallow channel region and a second shallow channel region. The channel is arranged between the first shallow channel region and the second shallow channel region and connects the first shallow channel region and the second shallow channel region. Further, the gate oxide layer is formed on a portion of the well region between the first shallow channel region and the second shallow channel region and includes a first gate oxide region and a second gate oxide region arranged on different sides of the channel. The gate region is formed on the channel and the gate oxide layer; the source region is formed in the first shallow channel region and vertically extends into the well region under the first shallow channel region; and the drain region is formed in the second shallow channel region and vertically extends into the well region under the second shallow channel region.

Metal-oxide-semiconductor field-effect transistor and method for manufacturing the same

A method for manufacturing a bipolar transistor includes forming a first epitaxial layer on a semiconductor substrate, forming a second epitaxial layer on the first epitaxial layer, forming an oxide layer on the second epitaxial layer, etching the oxide layer to form an opening in which the second epitaxial layer is exposed, and forming a third epitaxial layer in the opening. The first and third epitaxial layers have a first-type conductivity, and the second epitaxial layer has a second-type conductivity.

Bipolar transistor and method for manufacturing the same

A method for manufacturing compatible vertical double diffused metal oxide semiconductor (VDMOS) transistor and lateral double diffused metal oxide semiconductor (LDMOS) transistor includes: providing a substrate having an LDMOS transistor region and a VDMOS transistor region; forming an N-buried region in the substrate; forming an epitaxial layer on the N-buried layer region; forming isolation regions in the LDMOS transistor region and the VDMOS transistor region; forming a drift region in the LDMOS transistor region; forming gates in the LDMOS transistor region and the VDMOS transistor region; forming PBODY regions in the LDMOS transistor region and the VDMOS transistor region; forming an N-type GRADE region in the LDMOS transistor region; forming an NSINK region in the VDMOS transistor region, where the NSINK region is in contact with the N-buried layer region; forming sources and drains in the LDMOS transistor region and the VDMOS transistor region; and forming a P+ region in the LDMOS transistor region, where the P+ region is in contact with the source.

Compatible vertical double diffused metal oxide semiconductor transistor and lateral double diffused metal oxide semiconductor transistor and manufacture method thereof

Growing community of inventors

Wuxi, China

Le Wang