International Business Machines Corporation

Lawrence D Thorp

Kenneth A Bird

Kurt R Muller

Douglas Y Kim

Stephen J Kish

Julius J Lambright

David Clifford Long

Lawrence Jacobowitz

Mark J LaPlante

Einar S Mathisen

Gerhard Weiss

John Joseph Seksinsky

Poyang Lu

Mark G LaVine

A method and apparatus for the inspection and handling of surface level defects is taught. Briefly stated, the object to be inspected is positioned. A Laser light is polarized into at least one orientation and then reflected off of a rotated polygon mirror. This causes the light to 'move' over the area of interest. A plurality of fiber optic bundles are used to receive and conduct the reflected light back to photomultipliers. The photomultipliers convert the light into electrical signals while associated electronics digitize the signals, keeping track of pixels which are produced. By keeping track of pixel edge boundaries and determining if certain thresholds are exceeded or not met as appropriate, the area of interest can be checked for a variety of defects. By comparison of the defects to a reference base, the defects and hence the items inspected can be categorized.

Method and apparatus for object inspection

A method and apparatus for the inspection and handling of surface level defects is taught. Briefly stated, the object to be inspected is positioned. A Laser light is polarized into at least one orientation and then reflected off of a rotated polygon mirror. This causes the light to 'move' over the area of interest. A plurality of fiber optic bundles are used to receive and conduct the reflected light back to photomultipliers. The photomultiplers convert the light into electrical signals while associated electronics digitize the signals, keeping track of pixels which are produced. By keeping track of pixel edge boundaries and determining if certain thresholds are exceeded or not met as appropriate, the area of interest can be checked for a variety of defects. By comparison of the defects to a reference base, the defects and hence the items inspected can be categorized.

Advanced via inspection tool (AVIT)

An apparatus and method for accurately and rapidly machining a workpiece, particularly for drilling holes smaller than can be formed by other methods, by using a high power pulsed Nd:YAG laser. A low power HeNe laser is joined to the optical path of the high power laser. The colinear beams then scan along one axis of the workpiece. The low power beam is partially split off to a location determining device before final deflection to the workpiece. Deflection in a second axis is achieved by linearly moving the workpiece so that the beam will impinge upon the desired location of the workpiece.

Formation of high quality patterns for substrates and apparatus therefor

A spectrophotometer includes an illumination section for illuminating a test sample, and a spectrometer portion for receiving light from a test sample and measuring the radiant energy thereof as a function of wavelength. The spectrometer includes an entrance slit and two stationary gratings for dispersing light admitted through the slit into two separate dispersed beams or spectra. The separate beams are focused upon linear arrays of photodiodes providing outputs proportional to the intensity of the light rays at the different wavelengths received thereby. The gratings produce different primary orders of dispersion so that the efficiency of operation thereof is relatively high across a relatively wide band of radiant energy.

Wide band grating spectrometer

Growing community of inventors

Yorktown Heights, NY, United States of America

Lawrence D Thorp