Samsung Electronics Co., Ltd.

Kyubaik Chang

Jaehoon Jeong

Sunghee Lee

Jaeyoon Kim

Wooyoung Cheon

Ami Ma

QHwan Kim

Hyeonkyun Noh

A method for detecting a defect on a substrate, including receiving a first image, generating a second image, by converting the first image to grayscale levels, calculating a first gray level value, having a maximum number of pixels in the second image, and second and third gray level values, having a number of pixels in the second image equal to a predetermined fraction of the first gray level value, from a histogram of the number of pixels respective to the grayscale levels of the second image, converting the second image into a third image having pixels at a level lower than that of the first gray level value and a fourth image having pixels at a level equal to or higher than the first gray level value, generating fifth and sixth images by detecting edges by applying a Canny algorithm to the third and fourth images, respectively.

Method and apparatus for detecting defects on substrate

Growing community of inventors

Seoul, South Korea

Kyubaik Chang