Nippon Zeon Company, Ltd.

Other

Taisho Pharmaceutical Co., Ltd.

Japan As Represented by Director General of Agency of Industrial Science

Kuniaki Goto

Toshiro Yamada

Hideaki Kataoka

Akira Sekiya

Tadao Natsuume

Kiyoshi Watanabe

Jiro Tsuji

Harumi Asai

Tetsuya Takagaki

Yoshiaki Watanabe

Takashi Adachi

Tatsuya Sugimoto

Shigeo Morimoto

Hiroshi Fujisawa

Kazumi Kodama

Toshirou Yamada

Shigeru Kurosawa

Shuichi Akita

Tatsuo Sakashita

Kenji Tsukakoshi

Noriyasu Ohtsuki

A substrate to be etched is subjected to dry etching by using a dry etching gas containing a perfluorocycloolefin while a plasma with a high density region of at least 10 /cm is generated. As the perfluorocycloolefin, those having 3 to 8 carbon atoms, especially 4 to 6 carbon atoms are preferably used.

Dry etching method

A gaseous composition for dry etching, comprising a perfluorocycloolefin and 1 to 40% by mole, based on the perfluorocycloolefin, of at least one oxygen ingredient selected from oxygen gas and oxygen-containing gaseous compounds. As the perfluorocycloolefin, those having 3 to 8 carbon atoms, especially 4 to 6 carbon atoms, are preferably used.

Gas composition for dry etching and process of dry etching

Fluorinated hydrocarbons, detergents, deterging method, polymer-containing fluids, and method of forming polymer films

An electrically conductive elastomer film comprising (i) a thermoplastic elastomer and (ii) 5 to 100 parts by weight, based on 100 parts by weight of the thermoplastic elastomer, of an electrically conductive filler, and having a volume resistance of 0.1 to 5 &OHgr;cm as measured in the direction perpendicular to the film plane. This film is produced by a casting process wherein a releasable base is coated with a solution prepared by dissolving or dispersing 5 to 30 parts by weight of the sum of a thermoplastic elastomer and an electrically conductive filler in 100 parts by weight of an organic solvent; the thus-formed coating is dried; and then the thus-formed film is released from the releasable base.

Conductive elastomer film, method for production thereof, and conductive elastomer composition

Lubricative polymer containing liquid and method of forming film of

Process for preparing trifluorohydrocarbon compound

There are disclosed a process for producing an .alpha.-acyloxy-.alpha.,.beta.-unsaturated carbonyl compound represented by the general formula (VI): ##STR1## wherein R.sub.1, R.sub.2 and R.sub.4 are independently hydrogen atoms or substituted or unsubstituted hydrocarbon residues, or R.sub.1, R.sub.2 and R.sub.4, when taken together with one another in an optional combination, form a ring, R.sub.3 is a substituted or unsubstituted hydrocarbon residue, and  indicates that the configuration may be either E-configuration or Z-configuration, in particular, a 20-acyloxy-17(20)-methylen-21-al-steroid represented by the partial structural formula (II): ##STR2##

Process for producing an .alpha.-acyloxy-.alpha., .beta.-unsaturated

There are disclosed a process for producing an .alpha.-acyloxy-.alpha.,.beta.-unsaturated carbonyl compound represented by the general formula (VI): ##STR1## wherein R.sub.1, R.sub.2 and R.sub.4 are independently hydrogen atoms or substituted or unsubstituted hydrocarbon residues, or R.sub.1 and R.sub.2, when taken together with one another in an optional combination, form a ring, R.sub.3 is a substituted or unsubstituted hydrocarbon residue, and indicates that the configuration may be either E-configuration or Z-configuration, in particular, a 20-acyloxy-17(20)-methylen-21-al-steroid represented by the partial structural formula (II): ##STR2## wherein R is a hydrocarbon residue, and  indicates that the configuration of the acyloxy group and the formyl group bonded to the carbon atom at the 20-position may be either E-configuration or Z-configuration, which comprises oxidizing a propargyl ester represented by the general formula (V): ##STR3## wherein R.sub.1, R.sub.2, R.sub.3 and R.sub.4 have the same meanings as defined above; an al-steroid compound having the above partial structural formula which is an intermediate for producing a 21-acyloxy-20-keto-delta.sup.16 -steroid being extremely useful as an intermediate for important corticoids as drugs and obtained by being subjected said al-steroid to isomerization reaction; and a process for producing a 21-acyloxy-20-keto-delta.sup.16 -steroid which comprises oxidation reaction and isomerization reaction.

Process for producing an .alpha.-acyloxy-.alpha.,.beta.-unsaturated

A process for producing an oxime derivative, which comprises protecting the hydroxyimino group of an oxime compound with a protecting agent, subjecting the protected oxime compound to a given reaction, and thereafter deprotecting the reaction product, wherein a 2-alkenylating agent is used as the protecting agent.

Process for production of oxime derivatives

There is disclosed a novel protected des-N-methylerythromycin derivative, in which 2', 3' and 9-positions are protected with new substituents that can provide stabler derivative and can be eliminated in a single reaction under neutral condition.

Protected des-N-methylerythromycin derivative

A process for producing alpha,beta-unsaturated ketones represented by the following general formula ##STR1## wherein R.sub.1 represents a hydrocarbon radical, R.sub.2 represents an organic radical bonded through a carbon-carbon bond, R.sub.3 and R.sub.4 represent a hydrogen atom or a hydrocarbon radical, and R.sub.1, R.sub.2, R.sub.3 and R.sub.4 may be straight-chained or form a ring in arbitrary combinations, which comprises contacting an alpha-disubstituted-beta-keto acid ester represented by the general formula ##STR2## wherein R.sub.1, R.sub.2, R.sub.3 and R.sub.4 are as defined, and R.sub.5, R.sub.6, R.sub.7 and R.sub.8 represent a hydrogen atom or a hydrocarbon radical, with a catalyst consisting essentially of (a) a compound of a platinum-group metal and optionally (b) a monodentate ligand (b).

Process for producing alpha, beta-unsaturated ketones

A phenol derivative of the general formula ##STR1## wherein R and R' are a hydrogen atom or an alkyl group containing 1 to 4 carbon atoms, and X and Y, which may be identical or different, each represent a cyclopentyl or cyclohexyl group. The above phenol derivatives are useful as additives for inhibiting the deterioration of various degradable substances such as polymeric substances, or oily substances.

Novel derivatives useful as additives for inhibiting the deterioration

A phenol derivative of the general formula ##STR1## wherein R is a hydrogen atom or an alkyl group containing 1 to 4 carbon atoms, and X and Y, which may be identical or different, each represent a cyclopentyl or cyclohexyl group.

Novel phenol antioxidants

Novel phenol derivatives

A functional liquid for use as a heat transfer medium, anti-freezing liquid, insulating oil or the like, comprising at least one of dicyclopentylalkylbenzenes as the base.

Growing community of inventors

Tokyo, Japan

Kuniaki Goto