Taiwan Semiconductor Manufacturing Comp. Ltd.

Kun-Mo Lin

Yi-Hung Lin

Tze-Liang Lee

Jr-Hung Li

Chung-Ting Ko

Ting-Gang Chen

Victor Y Lu

Chih-Tsung Lee

Keith Kuang-Kuo Koai

A system and method for plasma enhanced deposition processes. An exemplary semiconductor manufacturing system includes a susceptor configured to hold a semiconductor wafer and a sector disposed above the susceptor. The sector includes a first plate and an overlying second plate, operable to form a plasma there between. The first plate includes a plurality of holes extending through the first plate, which vary in at least one of diameter and density from a first region of the first plate to a second region of the first plate.

Systems and methods for a plasma enhanced deposition of material on a semiconductor substrate

A device includes a pedestal. The pedestal includes a ground electrode, a central portion, and a peripheral portion. The ground electrode includes a top surface from which the peripheral portion is projected, thereby having a height difference between the central portion and the peripheral portion.

Device and method for manufacturing a semiconductor structure

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Taipei, Taiwan

Kun-Mo Lin