Smc Kabushiki Kaisha

Kouji Wada

Yasunori Yoshida

Keiichi Minegishi

Youichi Kawamura

Katsumi Iijima

Osamu Ohashi

Yutaka Yoshida

A nitrogen gas tank, a rotary pump and a mechanical booster pump are connected to a bonding vessel that constitutes a bonding apparatus for carrying out diffusion bonding, the apparatus further comprising a pressure sensor. A nitrogen gas atmosphere is formed inside the bonding vessel, and under control operations of a control circuit, a nitrogen introduction rate is controlled so that a pressure is substantially fixed at a predetermined pressure between 3-10Pa. At such a state, under the action of a rod of a hydraulic cylinder, a second electrode is brought into proximity with a first electrode, so that ultimately, a first object to be bonded and a second object to be bonded on the first electrode are pressed. Further, current is applied through the first electrode and the second electrode with respect to the first object to be bonded and the second object to be bonded.

Bonding method and apparatus therefor

A manifold comprises a base material section made from an amorphous resin, a solenoid valve section including a plurality of solenoid valves made up of valve bodies, and a coupling section including a plurality of pipe couplings. The overall surface of the base material section is covered in a surrounding fashion without pinholes by a protective film, which is a dense layer film made from a chemically stable material. The manifold is surrounded by a protective box as necessary.

Manifold made from amorphous resin

A fluid flow passage structure and a manufacturing method therefor are provided, in which fluid flow passages can be easily produced employing a simple structure and process, while also being suitable for reducing the weight thereof. Wire members having a predetermined pattern are disposed between a first block member and a second block member. Airtight and fluidtight hermetic fluid flow passages are formed between such members, by forming the first block member, the second block member, and the wire members together as an integral structure.

Fluid flow passage structure and manufacturing method thereof

A laminated structure is formed by stacking a first block member, an intermediate member, and a second block member together in this order, and then mutually joining each of the members. Further, by setting the elastic constant of the intermediate member to be greater than the elastic constants of the first block member and the second block member, deformation of grooves, which are formed in the first block member, is minimized.

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Kashiwa, Japan

Kouji Wada