Ngk Insulators, Inc.

Koki Kanno

Katsuhiro Imai

Jun Yoshikawa

Koichi Kondo

Provided is a zinc oxide-based sputtering target capable of improving the film formation rate while suppressing arcing in the formation of a zinc oxide-based transparent conductive film by sputtering. This zinc oxide-based sputtering target includes a zinc oxide-based sintered body mainly including zinc oxide crystal grains, and has a degree of (002) orientation of 50% or greater at a sputtering surface and a density of 5.30 g/cmor greater.

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Nagoya, Japan

Koki Kanno